Ceramic article having corrosion-resistant layer, semiconductor processing apparatus incorporating same, and method for forming same

Abstract

An article is provided that includes a substrate and a corrosion-resistant coating provided on the substrate. The substrate generally consists essentially of alumina, and the corrosion-resistant coating is provided so as to directly contact the substrate without the provision of intervening layers between the substrate and the corrosion-resistant coating, such as reaction products provided by high-temperature treatment processes. The corrosion-resistant coating generally consists essentially of a rare earth oxide, and has an adhesion strength not less than about 15 MPa. According to particular embodiments, the article is a ceramic component utilized and implemented in a semiconductor processing apparatus for processing semiconductor wafers.

1 - 40 . (canceled) 
     
     
         41 . A ceramic article, comprising:
 a substrate consisting essentially of alumina; and   a corrosion-resistant coating provided on the substrate and comprising at least 80 wt. % of a rare earth oxide, the corrosion-resistant coating directly contacting the substrate such that the ceramic article is free of intervening layers, including thermally reacted interlayers, between the substrate and the corrosion-resistant coating, the corrosion-resistant coating having an adhesion strength not less than 20 MPa.   
     
     
         42 . The article of  claim 41 , wherein the ceramic article comprises a component of a semiconductor processing apparatus. 
     
     
         43 . The article of  claim 42 , wherein the component is a chamber wall. 
     
     
         44 . The article of  claim 43 , wherein the component is a chamber lid. 
     
     
         45 . The article of  claim 43 , wherein the component is a chamber sidewall. 
     
     
         46 . The article of  claim 41 , wherein the corrosion resistant layer has an adhesion strength of not less than 25 MPa. 
     
     
         47 . The article of  claim 41 , wherein the corrosion resistant layer has an adhesion strength of not less than 30 MPa. 
     
     
         48 . The article of  claim 41 , wherein the corrosion resistant layer is deposited on the ceramic base material by thermal spraying. 
     
     
         49 . The article of  claim 41 , wherein the corrosion resistant coating has an average grain size not greater than about 0.5 microns. 
     
     
         50 . The article of  claim 41 , wherein the substrate consists essentially of α-alumina. 
     
     
         51 . The article of  claim 49 , wherein the average grain size is not greater than about 0.3 microns. 
     
     
         52 . The ceramic article or claim  1 , wherein the corrosion-resistant coating comprises at least 90 wt. % of the rare earth oxide. 
     
     
         53 . The ceramic article of  claim 52 , wherein the corrosion-resistant coating comprises at least 95 wt. % of the rare earth oxide.