Apparatus and method of crystallizing amorphous silicon

Abstract

A sequential lateral solidification apparatus includes a laser generator for generating and emitting a laser beam; an X-Y stage movable in two orthogonal axial directions; and a mask arranged between the laser generator and the X-Y stage. The mask has a plurality of slits through which the laser beam passes. An objective lens for scaling down the laser beam is arranged between the mask and the X-Y stage. A mask stage is connected to the mask for controlling minute movement of the mask for crystallizing amorphous silicon in one block.

1 . A sequential lateral solidification apparatus, comprising:
 a laser generator generating and emitting a laser beam;   an X-Y stage movable in two orthogonal axial directions;   a mask arranged between the laser generator and the X-Y stage, the mask having a plurality of slits through which the laser beam passes;   an objective lens arranged between the mask and the X-Y stage, the objective lens for scaling down the laser beam; and   a mask stage connected to the mask, the mask stage controlling minute movement of the mask.   
   
   
       2 . The apparatus according to  claim 1 , further comprising a condenser lens between the mask and the laser generator. 
   
   
       3 . The apparatus according to  claim 2 , wherein the condenser lens condenses the laser beam. 
   
   
       4 . The apparatus according to  claim 1 , wherein a distance over which the X-Y stage is movable is greater than a distance over which the mask controlled by the mask stage is movable. 
   
   
       5 - 14 . (canceled)