Environmental isolation system for flat panel displays

Abstract

The present invention generally comprises a system for FPD material storage and transport. The FPD system may contain environmental protection, material tracking and/or workstation loading capabilities. One of the components of the system includes a transportable, sealable container. Another component of the system includes a sealable load port against which a container is docked so that the substrates may be processed.

1 . A container for a flat panel display, comprising:
 a base;   a top;   sidewalls extending between the base and the top, wherein an opening is defined along a side of the container,   a flexible door moveably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, wherein ends of the rigid top member and ends of the rigid bottom member are affixed to corresponding drive members, the corresponding drive members synchronized with each other through a rotatable shaft.   
     
     
         2 . The container of  claim 1 , further comprising:
 a plurality of support elements disposed within the container for supporting flat panel displays.   
     
     
         3 . The container of  claim 1 , wherein the drive members are belts, the belts in contact with and driven by corresponding ends of the rotatable shaft. 
     
     
         4 . The container of  claim 2 , wherein the plurality of support elements are configured to provide an air bearing for the flat panel display to rest thereon. 
     
     
         5 . The container of  claim 1 , wherein the flexible door includes a rigid middle member having an aperture defined thereon, the aperture allowing access to one or more flat panel displays. 
     
     
         6 . The container of  claim 1 , wherein the flexible door includes a pair of rigid middle members spaced apart and between the rigid top and bottom members, the pair of rigid middle members defining an opening into the container. 
     
     
         7 . The container of  claim 6 , wherein the container is configured to interface with a tool for processing the flat panel display, the tool having a drive bar engaging with the container, the drive bar configured to move the flexible door. 
     
     
         8 . The container of  claim 1 , wherein the flexible door is disposed between a fixed seal and a moveable seal, the flexible door spaced apart from the fixed seal and the moveable seal when the flexible door opens or closes. 
     
     
         9 . The container of  claim 8 , wherein the moveable seal is connected to an actuator, the actuator configured to force the moveable seal against a first surface of the flexible door and force a second surface of the flexible door against the fixed seal. 
     
     
         10 . The container of  claim 8 , wherein the flexible seal and the moveable seal are positioned around a perimeter of the flexible door. 
     
     
         11 . A container for transporting flat panel displays, comprising:
 a plurality of spaced apart support members defined within the container for supporting the flat panel displays;   an opening defined along a surface of the container, the opening providing access to an inner region of the container;   a flexible door moveably disposed over the opening, the flexible door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a drive member;   a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the drive member to move the flexible door to open and close access to the inner region of the container; and   an air supply affixed to a surface of the container, the air supply having access to the inner region of the container, the air supply configured to generate air pressure within the container to prevent ingress of particulates from an external environment.   
     
     
         12 . The container of  claim 11 , wherein the air supply is a blower affixed to a side surface of the container opposing the opening, 
     
     
         13 . The container of  claim 11 , further comprising:
 a filter located downstream from the air supply.   
     
     
         14 . The container of  claim 13 , further comprising:
 a diffuser configured to distribute air from the air supply and the filter into the inner region of the container   
     
     
         15 . The container of  claim 1 , further comprising:
 a second synchronizing shaft disposed along an outer surface of the container diagonally opposed to the synchronizing shaft.   
     
     
         16 . The container of  claim 11 , wherein the air supply is further configured to provide a sweeping air flow over an inner surface of the flexible door when the flexible door is in an open state. 
     
     
         17 . The container of  claim 11 , further comprising:
 a flexible door receiving cavity disposed between an outer surface of the inner region and the outer surface of the container, the flexible door receiving cavity configured to accommodate the flexible door when the flexible door is in an open state.   
     
     
         18 . The container of  claim 17 , wherein the flexible door receiving cavity is located along a bottom surface of the container. 
     
     
         19 . The container of  claim 11 , wherein the container is configured to interface with a load port of a flat panel display processing tool. 
     
     
         20 . A flat panel display processing system, comprising:
 a flat panel display processing tool;   an enclosure having a controlled environment therein, the enclosure housing a handling robot for moving the flat panel substrate to and from the flat panel display processing tool and a load port configured to move a flat panel substrate therethrough;   a container configured to transport the flat panel substrate, the container configured to interface with the load port through a moveable door moveably disposed over an opening defined along a surface of the container, the moveable door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a plurality of drive members, the container further including a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the plurality of drive members to move the flexible door to open and close access to the inner region of the container, wherein the moveable door slideably moves around an outer surface of the container.   
     
     
         21 . The system of  claim 20 , wherein the handling robot includes a slide assembly configured to move in two dimensions. 
     
     
         22 . The system of  claim 20 , wherein the container includes support members for supporting the flat panel substrate, the flat panel substrate being non-planar when supported by the support members. 
     
     
         23 . The system of  claim 22 , wherein the handling robot includes arm extensions configured to access an inner region of the container when the moveable door is opened, an end of the arm extensions being curved upward to mate with the non-planar flat panel substrate. 
     
     
         24 . The system of  claim 20 , wherein the moveable door includes a pair of rigid middle members spaced apart and between the rigid top and bottom members, the pair of rigid middle members defining an opening into the container. 
     
     
         25 . The system of  claim 24 , wherein the enclosure engages with the moveable door of the container through a drive bar extending from a surface of the enclosure, the drive bar configured to synchronize movement of the moveable door with a moveable door of the enclosure. 
     
     
         26 . The system of  claim 20 , wherein the moveable door is composed of one of a polyester film or a stainless steel foil. 
     
     
         27 . A flat panel display processing system, comprising:
 a flat panel display processing tool;   a container configured to transport a substrate, the container configured to interface with the processing tool through a moveable door moveably disposed over an opening defined along a surface of the container, the moveable door having a rigid top member and a rigid bottom member, wherein the rigid top member is connected to the rigid bottom member through a plurality of drive members, the container further including a synchronizing shaft disposed across an outer surface of the container, the synchronizing shaft driving the plurality of drive members to move the flexible door to open and close access to the inner region of the container, wherein the moveable door slideably moves around an outer surface of the container.   
     
     
         28 . The system of  claim 27 , wherein the container includes a plurality of support elements configured to support a bottom surface of the substrate. 
     
     
         29 . The system of  claim 28 , further comprising:
 peripheral support members configured to support a peripheral surface of the substrate through gripper extensions, the peripheral support members configured to translate from a plane defined through the plurality of support elements in order to deform a shape of the substrate to a non-planar shape.   
     
     
         30 . The system of  claim 29 , wherein the non-planar shape is curvilinear and the peripheral support members translate in a vertical direction.