Single-Sided Apparatus For Manipulating Droplets By Electrowetting-On-Dielectric Techniques

Abstract

A single-sided electrowetting-on-dielectric apparatus, which is useful for microfluidic laboratory applications, is disclosed. The apparatus comprises a substrate, an array of control electrode elements disposed on the substrate, a first dielectric film disposed on, and overlaying, the substrate and tie array of control electrode elements, at least one ground electrode element disposed on the first dielectric film, a second dielectric film disposed on, and overlaying, the first dielectric film and the at least one ground electrode element, and an electrowetting-compatible surface film disposed on the second dielectric film. A method of making the apparatus is also disclosed.

1 . A single-sided electrowetting-on-dielectric apparatus comprising:
 a substrate;   an array of control electrode elements disposed on the substrate;   a first dielectric film disposed on, and overlaying, the substrate and the array of control electrode elements;   at least one ground electrode element disposed on the first dielectric film;   a second dielectric film disposed on, and overlaying, the first dielectric film and the at least one ground electrode element; and   an electrowetting-compatible surface film disposed on the second dielectric film.   
     
     
         2 . The apparatus of  claim 1 , farther comprising a thin insulator film disposed between the substrate and the array of control electrode elements and first dielectric film. 
     
     
         3 . The apparatus of  claim 1  wherein the at least one ground electrode element overlays the array of control electrode elements. 
     
     
         4 . The apparatus of  claim 1  wherein the at least one ground electrode element runs between adjacent control electrode elements. 
     
     
         5 . The apparatus of  claim 1  wherein the array of control electrode elements is a planar two-dimensional matrix. 
     
     
         6 . The apparatus of  claim 5  wherein the apparatus comprises at least two parallel ground electrode elements. 
     
     
         7 . The apparatus of  claim 5  wherein the apparatus comprises at least two parallel ground electrode elements and at least one additional ground electrode element arranged perpendicular to the at least two parallel ground electrode elements. 
     
     
         8 . A method of making an single-sided electrowetting-on-dielectric apparatus comprising the steps of:
 providing a substrate;   forming an array of control electrode elements disposed on the substrate;   forming a first dielectric film disposed on, and overlaying, the substrate and the array of control electrode elements;   forming at least one ground electrode element disposed on the first dielectric film;   forming a second dielectric film disposed on, and overlaying, the first dielectric film and the at least one ground electrode element; and   forming an electrowetting-compatible surface film disposed on the second dielectric film.   
     
     
         9 . The method of  claim 8 , further comprising the step of forming a thin insulator film disposed between the substrate and the array of control electrode elements and first dielectric film. 
     
     
         10 . The method of  claim 8  wherein the at least one ground electrode element overlays the array of control electrode elements. 
     
     
         11 . The method of  claim 8  wherein the at least one ground electrode element runs between adjacent control electrode elements. 
     
     
         12 . The method of  claim 8  wherein the array of control electrode elements is a planar two-dimensional matrix. 
     
     
         13 . The method of  claim 12  wherein the apparatus comprises at least two parallel ground electrode elements. 
     
     
         14 . The method of  claim 12  wherein the apparatus comprises at least two parallel ground electrode elements and at least one additional ground electrode element arranged perpendicular to the at least two parallel ground electrode elements.