Laser trimming to tune the resonance frequency of a spiral resonator, the characteristics of a high temperature superconductor filter comprised of spiral resonators, or the resonance frequency of a planar coil

Abstract

This invention provides a laser trimming method for tuning the frequency of a spiral resonator, and for improving the characteristics of a high temperature superconductor filter comprised of high temperature superconductor spiral resonators, by tuning the individual high temperature superconductor spiral resonators. This invention also provides a method for tuning the resonance frequency of a high temperature superconductor planar coil. This invention also provides a laser ablation process for creating high temperature superconductor circuit elements.

1 - 18 . (canceled) 
   
   
       19 . A process for forming a high temperature superconductor circuit element, comprising:
 (a) forming a film of a high temperature superconductor material on a substrate; and   (b) ablating selected regions of the high temperature superconductor film with a laser beam while protecting from ablation other regions of the high temperature superconductor film that form a pattern of the circuit element.   
   
   
       20 . The process of  claim 19 , wherein the high temperature superconductor circuit element is a high temperature superconductor filter. 
   
   
       21 . The process of  claim 20 , wherein the high temperature superconductor filter is comprised of at least two high temperature superconductor spiral resonators. 
   
   
       22 . The process of  claim 19 , wherein the high temperature superconductor circuit element is a high temperature superconductor coil. 
   
   
       23 . The process of  claim 22 , wherein the high temperature superconductor coil is a high temperature superconductor planar coil. 
   
   
       24 . A method for tuning the resonance frequency of a high temperature superconductor planar coil, comprising ablating portions of the high temperature superconductor of the high temperature superconductor planar coil with a laser beam. 
   
   
       25 . The method of  claim 24 , wherein the resonance frequency is increased by ablating the high temperature superconductor at the outer end of the high temperature superconductor planar coil. 
   
   
       26 . The method of  claim 24 , wherein the resonance frequency is increased by ablating the high temperature superconductor at the inner end of the high temperature superconductor planar coil. 
   
   
       27 . The method of  claim 24 , wherein the resonance frequency is tuned by ablating the high temperature superconductor in at least one interior location along the high temperature superconductor planar coil. 
   
   
       28 . The method of  claim 27 , wherein the amount of current density at the interior location of the high temperature superconductor planar coil is sufficiently low to result in an increase in the resonance frequency as a result of laser ablation. 
   
   
       29 . The method of  claim 27 , wherein the amount of current density at the interior location of the high temperature superconductor planar coil is sufficiently high to result in a decrease in the resonance frequency as a result of laser ablation. 
   
   
       30 . The method of  claim 24 , wherein the resonance frequency is increased by ablating the high temperature superconductor at one or more of the following locations:
 (a) at the outer end of the high temperature superconductor planar coil;   (b) at the inner end of the high temperature superconductor planar coil; and   (c) in at least one interior location of the high temperature superconductor planar coil at which the current density is sufficiently low to result in an increase in the resonance frequency as a result of laser ablation.   
   
   
       31 . The method of  claim 24 , wherein the resonance frequency is decreased by ablating the high temperature superconductor in at least one interior location of the high temperature superconductor planar coil at which the current density is sufficiently high to result in a decrease in the resonance frequency as a result of laser ablation. 
   
   
       32 - 37 . (canceled)