Amorphous carbon metal-to-metal antifuse with adhesion promoting layers

Abstract

A metal-to-metal antifuse having a lower metal electrode, a lower thin adhesion promoting layer disposed over the lower metal electrode, an amorphous carbon antifuse material layer disposed over the thin adhesion promoting layer, an upper thin adhesion promoting layer disposed over said antifuse material layer, and an upper metal electrode. The thin adhesion promoting layers are about 2 angstroms to 20 angstroms in thickness, and are from a material selected from the group comprising Si x C y and Si x N y . The ratio of x to y in Si x C y is in a range of about 1±0.4, and the ratio of x to y in Si x N y is in a range of about 0.75±0.225.

1 . A metal-to-metal antifuse comprising:
 a lower metal electrode;   a lower adhesion promoting layer disposed over said lower metal electrode, said lower adhesion promoting layer being without substantial affect on electrical characteristics of the antifuse;   an amorphous carbon antifuse material layer disposed over said lower adhesion promoting layer;   an upper adhesion promoting layer disposed over said antifuse material layer, said upper adhesion promoting layer being without substantial affect on electrical characteristics of the antifuse; and   an upper metal electrode.