Substrate treating apparatus

Abstract

A substrate treating apparatus for treating substrates with a treating liquid includes a treating tank having an inner tank for storing the treating liquid, and an outer tank for collecting the treating liquid overflowing the inner tank. A supply pipe interconnects the inner tank and the outer tank for circulating the treating liquid. A first branch pipe is shunted from the supply pipe, and a separator is mounted on the first branch pipe for separating deionized water and a solvent in the treating liquid, and discharging the deionized water. A second branch pipe interconnects positions upstream and downstream of the separator, and a deionized water remover is mounted on the second branch pipe for adsorbing and removing deionized water from the treating liquid. An injection pipe is connected to the supply pipe for injecting deionized water in a position downstream of the separator. A solvent injector injects the solvent into the injection pipe. A controller carries out a deionized water cleaning process for supplying deionized water from the injection pipe and cleaning the substrates inside the cleaning tank with deionized water, then a replacing process for injecting the solvent from the solvent injector and replacing the deionized water with the solvent, a separating and removing process for switching to the first branch pipe and causing the separator to remove the deionized water from the treating liquid, and an adsorbing and removing process for switching to the second branch pipe and causing the deionized water remover to adsorb and remove the deionized water from the treating liquid.

1 . A substrate treating apparatus for treating substrates with a treating liquid, comprising:
 a treating tank having an inner tank for storing the treating liquid, and an outer tank for collecting the treating liquid overflowing the inner tank;   a supply pipe interconnecting said inner tank and said outer tank for circulating the treating liquid;   a first branch pipe shunted from said supply pipe;   a separating device mounted on said first branch pipe for separating deionized water and a solvent in the treating liquid, and discharging the deionized water;   a second branch pipe interconnecting positions upstream and downstream of said separating device;   a deionized water removing device mounted on said second branch pipe for adsorbing and removing deionized water from the treating liquid;   an injection pipe connected to said supply pipe for injecting deionized water in a position downstream of said separating device;   a solvent injecting device for injecting the solvent into said injection pipe; and   a control device for carrying out a deionized water cleaning process for supplying deionized water from said injection pipe and cleaning the substrates inside the cleaning tank with the deionized water, then a replacing process for injecting the solvent from said solvent injecting device and replacing the deionized water with the solvent, a separating and removing process for switching to said first branch pipe and causing said separating device to remove the deionized water from the treating liquid, and an adsorbing and removing process for switching to said second branch pipe and causing said deionized water removing device to adsorb and remove the deionized water from the treating liquid.   
   
   
       2 . An apparatus as defined in  claim 1 , further comprising:
 a mixer mounted on said first branch pipe for mixing deionized water and solvent; and   a third branch pipe interconnecting a position upstream of said mixer, and a position downstream of said mixer and upstream of said separating device;   wherein said control device is arranged, when the solvent is water-soluble, to switch a flow of the treating liquid to said third branch pipe to carry out the separating and removing process, and when the solvent is water-insoluble, to allow the treating liquid to flow through said mixer to carry out the separating and removing process.   
   
   
       3 . An apparatus as defined in  claim 2 , wherein said mixer has an injecting portion for injecting deionized water. 
   
   
       4 . An apparatus as defined in  claim 1 , wherein said separating device has a filter for separating oil and water, a housing enclosing said filter, an inflow portion formed in said housing for introducing the treating liquid, an outflow portion formed in said housing for letting out the treating liquid having passed through said filter, a discharge portion formed in said housing for discharging deionized water separated by said filter, and a cooling device for cooling said filter. 
   
   
       5 . An apparatus as defined in  claim 2 , wherein said separating device has a filter for separating oil and water, a housing enclosing said filter, an inflow portion formed in said housing for introducing the treating liquid, an outflow portion formed in said housing for letting out the treating liquid having passed through said filter, a discharge portion formed in said housing for discharging deionized water separated by said filter, and a cooling device for cooling said filter. 
   
   
       6 . An apparatus as defined in  claim 1 , further comprising:
 an ultrasonic applying device for applying ultrasonic vibration to the treating liquid stored in said inner tank; and   a concentration meter for measuring deionized water concentration in the treating liquid;   wherein said control device is arranged to operate said ultrasonic applying device after the deionized water concentration measured by said concentration meter falls to a predetermined value.   
   
   
       7 . An apparatus as defined in  claim 6 , wherein said predetermined value is 10,000 ppm. 
   
   
       8 . An apparatus as defined in  claim 1 , wherein said solvent injecting device is arranged to inject one of HFE (hydrofluoroether) and IPA (isopropyl alcohol). 
   
   
       9 . A substrate treating apparatus for treating substrates with a treating liquid, comprising:
 a treating tank having an inner tank for storing the treating liquid, and an outer tank for collecting the treating liquid overflowing the inner tank;   a supply pipe interconnecting said inner tank and said outer tank for circulating the treating liquid;   a deionized water supply device for supplying deionized water as treating liquid;   a solvent supply device for supplying a solvent as treating liquid;   a branch pipe shunted from said supply pipe;   a deionized water removing device mounted on said branch pipe for removing deionized water from the treating liquid;   a solvent injecting device for injecting the solvent into the supply pipe downstream of said deionized water removing device; and   a control device for carrying out a deionized water cleaning process for supplying deionized water from said deionized water supply device and cleaning the substrates inside the cleaning tank with the deionized water, then a replacing process for injecting the solvent from said solvent supply device and replacing the deionized water with the solvent, a deionized water removing process for switching to said branch pipe and causing said deionized water removing device to remove the deionized water from the treating liquid, and causing said solvent injecting device to replenish the solvent.   
   
   
       10 . An apparatus as defined in  claim 9 , further comprising:
 a first mixer mounted on said branch pipe upstream of said deionized water removing device for mixing fluids;   a deionized water injecting device for injecting deionized water into said branch pipe upstream of said first mixer; and   a second mixer mounted on said supply pipe down-stream of said solvent injecting device for mixing fluids;   wherein said control device is arranged, when deionized water concentration in the treating liquid falls below a predetermined value, to inject deionized water from said deionized water injecting device, and control said deionized water injecting device and said solvent injecting device such that a sum of an injection rate of the solvent from said solvent injecting device and a difference between an injection rate of deionized water and a quantity of the treating liquid removed by said deionized water removing device becomes substantially zero.   
   
   
       11 . An apparatus as defined in  claim 9 , wherein said deionized water removing device has a filter for separating oil and water, a housing enclosing said filter, an inflow portion formed in said housing for introducing the treating liquid, an outflow portion formed in said housing for letting out the treating liquid having passed through said filter, a discharge portion formed in said housing for discharging deionized water separated by said filter, and a cooling device for cooling said filter. 
   
   
       12 . An apparatus as defined in  claim 10 , wherein said deionized water removing device has a filter for separating oil and water, a housing enclosing said filter, an inflow portion formed in said housing for introducing the treating liquid, an outflow portion formed in said housing for letting out the treating liquid having passed through said filter, a discharge portion formed in said housing for discharging deionized water separated by said filter, and a cooling device for cooling said filter. 
   
   
       13 . An apparatus as defined in  claim 9 , wherein said deionized water removing device comprises a deionized water adsorbing and removing device for adsorbing deionized water while passing the solvent. 
   
   
       14 . An apparatus as defined in  claim 9 , wherein said solvent supply device is arranged to supply HFE (hydrofluoroether), and said solvent injecting device is arranged to inject IPA (isopropyl alcohol). 
   
   
       15 . A substrate treating apparatus for treating substrates with a treating liquid, comprising:
 a treating tank for storing the treating liquid;   a supply pipe for circulating the treating liquid to supply the treating liquid discharged from the treating tank back to the treating tank;   a first branch pipe shunted from said supply pipe;   a cooling device mounted on said first branch pipe for cooling the treating liquid flowing therethrough;   a second branch pipe interconnecting positions of the supply pipe upstream and downstream of said cooling device;   a separating device mounted on said second branch pipe for separating deionized water and a solvent in the treating liquid, and discharging the deionized water from the treating liquid;   an injection pipe connected to said supply pipe for injecting deionized water in a position downstream of said separating device;   a water-soluble solvent injecting device for injecting a water-soluble solvent into said injection pipe;   a water-insoluble solvent injecting device for injecting a water-insoluble solvent into said injection pipe; and   a control device for carrying out a deionized water cleaning process for cleaning the substrates inside the cleaning tank with deionized water, then a replacing process for injecting the water-soluble solvent from said water-soluble solvent injecting device into said supply pipe and replacing the deionized water with the water-soluble solvent, a cooling process by switching a channel to said first branch pipe for said cooling device to cool the treating liquid, a separating and removing process by switching a channel to said second branch pipe for said separating device to remove the deionized water from the treating liquid, and a replacement promoting process for injecting the water-insoluble solvent from said water-insoluble solvent injecting device into said supply pipe.   
   
   
       16 . An apparatus as defined in  claim 15 , further comprising:
 a third branch pipe interconnecting positions upstream and downstream of said separating device; and   a deionized water removing device mounted on said third branch pipe for adsorbing and removing the deionized water from the treating liquid;   wherein said control device is arranged to switch the channel to said third branch pipe after said separating and removing process.   
   
   
       17 . An apparatus as defined in  claim 16 , further comprising:
 a mixer mounted on said second branch pipe upstream of said separating device for mixing deionized water and the solvent; and   a fourth branch pipe interconnecting a position upstream of said mixer, and a position downstream of said mixer and upstream of said separating device;   wherein said control device is arranged to switch the channel to said mixer for said separating and removing process and said replacement promoting process, and switch the channel to said fourth branch pipe for other processes than said separating and removing process and said replacement promoting process.   
   
   
       18 . An apparatus as defined in  claim 15 , wherein said water-soluble solvent injecting device is arranged to inject IPA (isopropyl alcohol) as the water-soluble solvent. 
   
   
       19 . An apparatus as defined in  claim 15 , wherein said water-insoluble solvent injecting device is arranged to inject HFE (hydrofluoroether) as the water-insoluble solvent. 
   
   
       20 . An apparatus as defined in  claim 15 , wherein said control device is arranged to inject the water-insoluble solvent at a low flow rate from said water-insoluble solvent injecting device.