Method and apparatus for simultaneously depositing and observing materials on a target

Abstract

A system for joining at least two beams of charged particles that includes directing a first beam along a first axis into a field. A second beam is directed along a second axis into the field. The first and second beams are turned, by interaction between the field and the first and second beams, into a third beam directed along a third axis.

1 . A method for directing at least two beams of particles, comprising:
 (a) directing a first beam of particles along a first axis into a field where said first beam exits said field along a second axis; and   (b) directing a second beam of particles along a third axis into said field where said second beam exits said field along a fourth axis, said third axis is at least one of colinear and coaxial with said second axis and said second beam along said third axis has a different direction of travel than said first beam along said second axis.   
   
   
       2 . The method of  claim 1  wherein said field is a magnetic field having a geometric center thereto. 
   
   
       3 . The method of  claim 2  wherein said first beam is focused upon said geometric center. 
   
   
       4 . The method of  claim 3  wherein said second beam is focused upon said geometric center. 
   
   
       5 . The method of  claim 4  wherein said first and fourth axes are not coaxial. 
   
   
       6 . The method of  claim 5  wherein said first and fourth axes are not colinear. 
   
   
       7 . The method of  claim 1  wherein said second and third axes are coaxial. 
   
   
       8 . The method of  claim 1  wherein said second and third axes are colinear. 
   
   
       9 . The method of  claim 1  wherein said field is a cylindrical magnetic field. 
   
   
       10 . The method of  claim 1  wherein said field is a magnetic field having a substantially symmetrical cylindrical form having a geometric center thereto upon which said beams are focused. 
   
   
       11 . An apparatus that co-axially directs at least two beams of charged particles, comprising:
 (a) a field;   (b) a first beam of particles directed along a first axis into said field;   (c) a second beam of particles directed along a second axis into said field; and   (d) whereby said first and second beams are co-axially aligned, by interaction between said field and said first and second beams, into a third beam directed along a third axis.   
   
   
       12 . The apparatus of  claim 11  wherein said field is a magnetic field having a geometric center thereto. 
   
   
       13 . The apparatus of  claim 12  wherein said first beam is focused upon said geometric center. 
   
   
       14 . The apparatus of  claim 13  wherein said second beam is focused upon said geometric center. 
   
   
       15 . The apparatus of  claim 14  wherein said third beam is at least one of colinear and coaxial. 
   
   
       16 . The apparatus of  claim 15  wherein said magnetic field is cylindrical. 
   
   
       17 . The apparatus of  claim 11  wherein said field is a magnetic field having a substantially symmetrical cylindrical form having a geometric center thereto upon which said beams are focused.