Method of forming catalyst nanoparticles for nanowire growth and other applications

Abstract

Methods for forming a predetermined pattern of catalytic regions having nanoscale dimensions are provided for use in the growth of nanowires. The methods include one or more nanoimprinting steps to produce arrays of catalytic nanoislands or nanoscale regions of catalytic material circumscribed by noncatalytic material.

1 - 23 . (canceled) 
     
     
         24 . A device comprising:
 i) a mold with nanoscale protrusions forming a desired pattern; and   ii) catalytic material coating the protrusions   
     
     
         25 . A device comprising:
 i) a layer of masking material; and   ii) an underlying layer   
       said masking material having a desired pattern of nanoscale depressions exposing the underlying layer. 
     
     
         26 . The device of  claim 25 , wherein the underlying layer contains catalytic material. 
     
     
         27 . The device of  claim 25 , further comprising catalytic material deposited within the nanoscale depressions. 
     
     
         28 . A device comprising:
 i) a substrate:   ii) a catalytic layer on the substrate;   iii) a non-catalytic layer over the catalytic layer; and   iv) a layer of masking material overlying the noncatalytic layer, said masking material having a desired pattern of nanoscale depressions exposing the non-catalytic layer.   
     
     
         29 . The device of  claim 28 , wherein the nanoscale depressions also expose nanoscale regions of the catalytic layer. 
     
     
         30 . A device comprising:
 i) a substrate; and   ii) a regular array of catalytic nanoislands on the substrate.   
     
     
         31 . A device comprising:
 i) a substrate;   ii) a catalytic layer on the substrate; and   iii) a non-catalytic layer over the catalytic layer, said non-catalytic layer having a regular pattern of nanoscale openings exposing the catalytic layer.