US2008311530A1PendingUtilityA1
Graded topcoat materials for immersion lithography
Est. expiryJun 15, 2027(~0.9 yrs left)· nominal 20-yr term from priority
G03F 7/11Y10S438/952G03F 7/2041
54
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Abstract
A topcoat material for immersion lithography and a method of performing immersion lithography using the topcoat material. The topcoat material includes a mixture of a first polymer and a second polymer. The first and second polymers of the topcoat material, when the topcoat material is formed into a topcoat layer between an immersion fluid and a photoresist layer, disperse non-homogenously throughout the topcoat layer.
Claims
exact text as granted — not AI-modified1 - 4 . (canceled)
5 . A method of forming an image in a photoresist layer, comprising:
(a) forming an anti-reflective coating over a top surface of a substrate, wherein said photoresist layer is formed (b) forming said photoresist layer on a top surface of said anti-reflective coating; (c) forming a topcoat layer on a top surface of said photoresist layer, said topcoat layer comprising a first polymer and a second polymer, said second polymer different from said first polymer, said second polymer miscible with said first polymer, said first and second polymers of said topcoat layer dispersing non-homogenously in a vertical direction perpendicular to said top surface of said photoresist layer; (d) removing a casting solvent from said topcoat layer by heating said photoresist layer to a temperature above room temperature; (e) forming a layer of immersion fluid between said topcoat layer and a final lens element or window of an immersion lithography system; (f) exposing said photoresist to radiation through a photomask having opaque and clear regions, said opaque regions blocking said radiation and said clear regions being transparent to said radiation, said radiation changing the chemical composition of regions of said photoresist layer exposed to said radiation, forming exposed and unexposed regions in said photoresist layer; (g) heating said photoresist layer to a temperature above room temperature. (h) removing either said exposed regions of said photoresist layer or said unexposed regions of said photoresist layer; (i) heating remaining regions of said photoresist layer to a temperature above room temperature; (j) removing said topcoat layer; wherein after step (c) and before step (f) said first polymer has a first molar concentration at a top surface of said topcoat layer that is greater than a second molar concentration of said first polymer at a bottom surface of said topcoat layer, said bottom surface of said topcoat layer in direct physical contact with said top surface of said photoresist layer; wherein after step (c) and before step (f) said second polymer has a first molar concentration at a top surface of said topcoat layer that is less than a second molar concentration of said second polymer at a bottom surface of said topcoat layer, said bottom surface of said topcoat layer in direct physical contact with said top surface of said photoresist layer: wherein said immersion fluid is selected from the group consisting of water, water with soluble chemical additives, a hydrocarbon fluid, a water based nano-particle dispersion, and a hydrocarbon based nano-particle dispersion; wherein a weight percentage of fluorine in said first polymer is greater than a weight percentage of fluorine in said second polymer; wherein said first polymer is selected from the group consisting of:
(1) a polymer comprising:
(2) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100,
(3) a polymer comprising
(4) a polymer comprising:
(5) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(6) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(7) a polymer comprising:
(8) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(9) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(10) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(11) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 100 and Z=any number from 0 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(12) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100, and
(13) a polymer comprising W mer % of
and Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100; and
wherein said second polymer is selected from the group consisting of:
(14) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(15) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9, Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(16) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(17) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(18) a polymer comprising Y mer % of
and Z mer % of
wherein Y=any number from 0 to 99.9 and Z=any number from 0.1 to 100 such that Y+Z is greater than or equal to 50 and less than or equal to 100.
(19) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(20) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(21) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(22) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
(23) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100, and
(24) a polymer comprising W mer % of
Y mer % of
and Z mer % of
wherein W=any number from 0 to 99.9, Y=any number from 0.1 to 99.9, Z=any number from 0 to 99.9 such that W+Y+Z is greater than or equal to 50 and less than or equal to 100.
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