Composition for ferroelectric thin film formation, ferroelectric thin film and liquid-jet head

Abstract

A composition for ferroelectric thin film formation, comprising at least a colloidal solution containing metals serving as materials constituting a ferroelectric thin film, the colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks; a ferroelectric thin film formed from the composition for ferroelectric thin film formation, and a liquid-jet head equipped with a piezoelectric element having the ferroelectric thin film.

1 . A liquid-jet head which is equipped with a piezoelectric element having a ferroelectric thin film from a composition for ferroelectric thin film formation, as a piezoelectric actuator for jetting a liquid,
 wherein the composition for ferroelectric thin film formation comprises at least a colloidal solution containing metals serving as materials constituting the ferroelectric thin film, said colloidal solution having an average colloidal particle diameter of 1 to 100 nm, and obtaining a particle size distribution having two or more peaks.   
     
     
         2 . The liquid-jet head according to  claim 1 , wherein the average colloidal particle diameter is 1 to 30 nm. 
     
     
         3 . The liquid-jet head according to  claim 1 , wherein the composition for ferroelectric thin film formation comprises the colloidal solution containing a complex having, as a nucleus, at least one of the metals serving as the materials constituting the ferroelectric thin film. 
     
     
         4 . The liquid-jet head according to  claim 1 , wherein the composition for ferroelectric thin film formation comprises the colloidal solution containing a cluster complex comprising a cluster of two or more complexes, each of the complexes having, as a nucleus, at least one of the metals serving as the materials constituting the ferroelectric thin film. 
     
     
         5 . The liquid-jet head according to  claim 1 , wherein the composition for ferroelectric thin film formation comprises the colloidal solution containing a colloidal agglomerate comprising an agglomerate of complexes, each of the complexes having, as a nucleus, at least one of the metals serving as the materials constituting the ferroelectric thin film. 
     
     
         6 . The liquid-jet head according to  claim 1 , wherein the metals serving as the materials constituting the ferroelectric thin film include at least Pb, Zr and Ti. 
     
     
         7 . The liquid-jet head according to  claim 6 , wherein the metals serving as the materials constituting the ferroelectric thin film are Pb, Zr and Ti, and the colloidal solution contains colloidal particles comprising lead acetate, colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules, and colloidal particles comprising titanium alkoxides and lead acetate chelate-stabilized by amines. 
     
     
         8 . The liquid-jet head according to  claim 7 , wherein the average colloidal particle diameter of the colloidal particles comprising lead acetate is 1 to 6 nm, the average colloidal particle diameter of the colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules is 1 to 10 nm, and the average colloidal particle diameter of the colloidal particles comprising titanium alkozides and lead acetate chelate-stabilized by amines is 3 to 50 nm. 
     
     
         9 . The liquid-jet head according to  claim 7 , wherein the colloidal particles comprising lead acetate, the colloidal particles comprising lead acetate and zirconium acetylacetonate stabilized by water molecules, and the colloidal particles comprising titanium alkoxides and lead acetate chelate-stabilized by amines have the average colloidal particle diameter in increasing order.