Leak Characterization Apparatuses and Methods for Fluid Storage Containers

Abstract

According to the invention, an apparatus to characterize leaks in a fluid storage container is disclosed. The apparatus may include a valve coupler, a gas manifold and a processor. The valve coupler may couple the apparatus with a closed valve on the fluid storage container. The gas manifold may be coupled with the valve coupler and may include a first branch connected with a gas monitoring device. The gas monitoring device may scan for a plurality of gases that may be emitted by the closed valve of the fluid storage container. The processor may be operable to receive gas monitoring device data representing masses for one or more of the plurality of gases detected by the monitor.

1 . An apparatus to characterize leaks in a fluid storage container, the apparatus comprising:
 a valve coupler to couple the apparatus with a closed valve on the fluid storage container;   a gas manifold coupled with the valve coupler, wherein the gas manifold comprises a first branch connected with a gas monitoring device, wherein the gas monitoring device scans for a plurality of gases that may be emitted by the closed valve of the fluid storage container; and   an indicator device operable to communicate a leak has been detected based at in part on gas monitoring device data.   
   
   
       2 . The leak characterization apparatus of  claim 1 , further comprising a processor operable to receive gas monitoring device data representing masses for one or more of the plurality of gases detected by the monitor. 
   
   
       3 . The leak characterization apparatus of  claim 1 , wherein the gas monitoring device comprises a mass spectrometer that scans a mass range from about 1 atomic mass unit to about 400 atomic mass units. 
   
   
       4 . The leak characterization apparatus of  claim 2 , wherein the processor is operable to generate a mass spectrum from the data representing masses for one or more of the plurality of gases detected by the monitor. 
   
   
       5 . The leak characterization apparatus of  claim 4 , wherein the processor is in communication with a display that can display the mass spectrum. 
   
   
       6 . The leak characterization apparatus of  claim 2 , wherein the processor is operable to calculate leak rates for one or more of the plurality of gases. 
   
   
       7 . The leak characterization apparatus of  claim 6 , wherein the processor is in communication with a display that can display the leak rates for the one or more gases. 
   
   
       8 . The leak characterization apparatus of  claim 7 , wherein the leak rates are displayed in units of cubic centimeters per second. 
   
   
       9 . The leak characterization apparatus of  claim 1 , wherein the gas manifold further comprises a second branch connected with a manifold pump to evacuate the manifold, and a third branch connected with a pressure measuring device to measure the gas pressure in the manifold. 
   
   
       10 . The leak characterization apparatus of  claim 1 , wherein the fluid storage container comprises a high-pressure gas cylinder. 
   
   
       11 . The leak characterization apparatus of  claim 1 , wherein the valve coupler comprises an outlet connector for a compressed gas valve. 
   
   
       12 . A method to characterize a leak in a fluid storage container, the method comprising:
 connecting a valve on the fluid storage container with a leak characterization apparatus comprising a gas manifold, wherein the manifold is in fluid communication with a valve coupler that connects with the valve on the container and a gas monitoring device;   evacuating the gas manifold;   scanning the evacuated manifold with the gas monitoring device for a plurality of gases that may be emitted by the fluid storage container; and   generating leak characterization data about one or more of the plurality of gases.   
   
   
       13 . The leak characterization method of  claim 12 , wherein the method further comprises sending the leak characterization data to a processor operable to calculate leak flow rates for one or more of the plurality gases. 
   
   
       14 . The leak characterization method of  claim 13 , wherein the method further comprises displaying the leak flow rates for the one or more gases on a display in electronic communication with the processor. 
   
   
       15 . The leak characterization method of  claim 12 , wherein the method further comprises pressurizing the fluid storage container with a leak testing fluid before connecting the container with the leak characterization apparatus. 
   
   
       16 . The leak characterization method of  claim 15 , wherein the leak testing fluid comprises krypton, neon, xenon, argon, hydrogen, oxygen, helium, nitrogen, ammonia, arsine, phosphine, silane, acetylene, a halogen, a hydrogen halide, a boron halide; a hydrogen chloride, hydrogen bromide, chlorine, tungsten hexafluoride, hydrogen fluoride, carbon dioxide, nitrous oxide, nitrogen dioxide, dicholorosilane, trichlorosilane, carbonyl sulfide, sulfur hexafluoride, phosphine, arsine, disilane, chlorine trifluoride, boron trichloride, halogenated compounds, hydrocarbons, amines, or anorganometallic precursors. 
   
   
       17 . The leak characterization method of  claim 12 , wherein the gas monitoring device scans a mass range from about 1 atomic mass unit to about 400 atomic mass units. 
   
   
       18 . The leak characterization method of  claim 12 , wherein the leak characterization data comprises a mass spectrum of the plurality of gases emitted by the fluid storage container. 
   
   
       19 . An apparatus to characterize leaks in a fluid storage container, the apparatus comprising:
 a valve coupler to couple the apparatus with a closed valve on the fluid storage container;   a gas manifold coupled with the valve coupler, wherein the gas manifold comprises a first branch connected with a gas monitoring device, wherein the gas monitoring device scans for a plurality of gases that may be emitted by the closed valve of the fluid storage container; and   an indicator device operable to communicate a leak has been detected based at in part on gas monitoring device data.