Direct tool loading

Abstract

Systems for loading and unloading semiconductor wafers to and from semiconductor processing or storage equipment are disclosed. One system includes a pair of conveyor rails for transporting a container capable of holding semiconductor wafers around a processing facility. The pair of conveyor rails defining a plane on which the container is supported and transported. The system includes a load port positioned adjacent to the conveyor rails. The load port has a support plate for holding a container and an arm coupled to the support plate. The arm is configured to move between a lower position and an upper position, and the lower position is defined between the pair of conveyor rails and below the plane of the conveyor rails. The upper position is in a load/unload position, and the arm has a bend that enables the support plate to be placed over one of the pair of conveyor rails without requiring a notch in the one conveyor rail.

1 . A load port system for loading and unloading semiconductor wafers to and from semiconductor processing or storage equipment, comprising:
 (a) conveyor rails for transporting a container capable of holding semiconductor wafers around a processing facility;   (b) the load port being positioned adjacent to the conveyor rails to enable direct loading of the container using the load port, the load port includes,
 (i) a plate having an opening that defines access into and out of the processing or storage equipment, the plate being defined in a substantial vertical orientation; 
 (ii) a support plate for handling a container; 
 (iii) an arm coupled to the support plate, the arm coupled to a drive mechanism to move the arm along the substantial vertical orientation between a lower position that is over the conveyor rails and an upper position proximate to the opening of the plate, the arm having a bend to fit over the conveyor rails without requiring a notch in the conveyor rails, the arm enabling direct loading of the container from the conveyor rails in the lower position to the opening of the plate by movement of the arm along the vertical orientation. 
   
     
     
         2 . The load port system as recited in  claim 1 , wherein the arm being in the lower position over the conveyor rails prevents the container from passing by the load port in either a downstream or an upstream direction along the conveyor rails. 
     
     
         3 . The load port system as recited in  claim 1 , wherein the support includes kinematic pins for mating with an underside of the container. 
     
     
         4 . The load port system as recited in  claim 1 , wherein the conveyor rails are configured to be defined near a floor and the load port has a base that is placed over the floor, the plate of the load port being substantially parallel to an orientation of the conveyor rails, such that one of the conveyor rails is closer to the plate than another one of the conveyor rails. 
     
     
         5 . The load port system as recited in  claim 1 , further including a port door adapted to move between an open position that allows access to semiconductor wafers though said opening, and a closed position that substantially covers said opening. 
     
     
         6 . The load port as recited in  claim 1 , wherein said support plate includes at least one registration feature for engaging a bottom surface of the container. 
     
     
         7 . The load port as recited in  claim 1 , wherein said container support includes a mechanism for moving substantially horizontally towards and away from said plate. 
     
     
         8 . The load port as recited in  claim 1 , wherein said container support plate is adapted to receive a container for storing semiconductor wafers having a diameter between 100 mm-600 mm. 
     
     
         9 . The load port as recited in  claim 1 , wherein said plate comprises one of a BOLTS interface or a BOLTS-light interface. 
     
     
         10 . The load port as recited in  claim 1 , wherein the load port is positioned proximate to the conveyor such that said support plate, through vertical motion, is able to lift the container, when seated on the conveyor, directly off of the conveyor to a raised position proximate to the opening of the plate. 
     
     
         11 . The load port as recited in  claim 10 , wherein the support plate moves in a horizontal orientation when in the up position to enable the container to sit next to the opening in the plate. 
     
     
         12 . The load port as recited in  claim 1 , further comprising:
 an optical detector system for determining a position of any semiconductor wafers located in the container.   
     
     
         13 . A system for loading and unloading semiconductor wafers to and from semiconductor processing or storage equipment, the system comprising:
 conveyor rails for transporting a container capable of holding semiconductor wafers around a processing facility, the conveyor rails defining a plane on which the container is transported;   a load port positioned adjacent to the conveyor rails to enable direct loading of the container using the load port, the load port having an opening that defines access into and out of the processing or storage equipment, the load port having a support plate for handling a container and an arm coupled to the support plate, the arm being connected to a drive mechanism to move the arm between a lower position, the lower position defined between the conveyor rails and below the plane of the conveyor rails, and an upper position proximate to the opening, the arm having a bend that enables the support plate to be placed over the conveyor rails without requiring a notch in the conveyor rails, the arm enabling direct loading of the container from the conveyor rails in the lower position to the opening by movement of the arm.   
     
     
         14 . The system as recited in  claim 13 , wherein the arm being in the lower position prevents the container or other containers from passing by the load port in either a downstream or an upstream direction along the conveyor rails. 
     
     
         15 . The system as recited in  claim 13 , wherein the support includes kinematic pins for mating with an underside of the container. 
     
     
         16 . The system as recited in  claim 13 , wherein the conveyor rails are configured to be defined near a floor and the load port has a base that is placed over the floor, the load port being substantially parallel to an orientation of the conveyor rails, such that one of the conveyor rails is closer to the load port than another one of the conveyor rails. 
     
     
         17 . The system as recited in  claim 13 , further including a port door adapted to move between an open position that allows access to semiconductor wafers though said opening, and a closed position that substantially covers said opening. 
     
     
         18 . The system as recited in  claim 13 , wherein said support plate includes at least one registration feature for engaging a bottom surface of the container. 
     
     
         19 . A system for loading and unloading semiconductor wafers to and from semiconductor processing or storage equipment, the system comprising:
 a pair of conveyor rails for transporting a container capable of holding semiconductor wafers around a processing facility, the pair of conveyor rails defining a plane on which the container is supported and transported;   a load port positioned adjacent to the conveyor rails, the load port having a support plate for holding a container and an arm coupled to the support plate, the arm configured to move between a lower position and an upper position, the lower position defined between the pair of conveyor rails and below the plane of the conveyor rails, and the upper position in a load/unload position, the arm having a bend that enables the support plate to be placed over one of the pair of conveyor rails without requiring a notch in the one conveyor rail.   
     
     
         20 . The system as recited in  claim 19 , wherein the load port having an opening that defines access into and out of the processing or storage equipment.