Micromachined imaging transducer

Abstract

The present invention generally relates to medical devices, and more particularly to an improved medical imaging device. In one embodiment, an imaging device includes a drive shaft having proximal and distal ends received within the lumen; and an imaging transducer assembly coupled to the distal end of the drive shaft and positioned at the distal portion of the elongate member. The imaging transducer assembly includes one or more imaging transducers formed with a piezoelectric composite plate using photolithography based micromachining.

1 .- 11 . (canceled) 
   
   
       12 . A method for fabricating one or more imaging transducers, comprising the steps of: using photolithography based micromachining to form a plurality of posts on a piezoelectric material plate; and filling a plurality of kerfs surrounding the plurality of posts with a polymeric material. 
   
   
       13 . The method of  claim 12 , further comprising lapping the piezoelectric material plate. 
   
   
       14 . The method of  claim 12 , further comprising electroding the piezoelectric material plate. 
   
   
       15 . The method of  claim 12 , wherein the step of forming a plurality of posts on a piezoelectric material plate using photolithography based micromachining includes using a reactive ion etching process. 
   
   
       16 . The method of  claim 12 , wherein the step of forming a plurality of posts on a piezoelectric composite plate using photolithography based micromachining includes the step of forming a hard mask over portions of the plate where the plurality of posts are to be formed. 
   
   
       17 . The method of  claim 16 , wherein the hard mask includes at least one of nickel and platinum. 
   
   
       18 . The method of  claim 12 , wherein the piezoelectric material plate has a single crystal structure or a polycrystalline structure. 
   
   
       19 . The method of  claim 12 , wherein the piezoelectric material plate includes at least one of PZT ceramic, PMN-PT single crystal, and PZN-PT single crystal. 
   
   
       20 .- 27 . (canceled)