Electro-optical circuitry having integrated connector and methods for the production thereof

Abstract

A packaged electro-optic integrated circuit and a multi-fiber connector including an integrated circuit substrate, at least one optical signal providing element, at least one optical signal sensor, sensing at least one optical signal from the at least one optical signal providing element and at least one discrete reflecting optical element, mounted onto the integrated circuit substrate, cooperating with the at least one optical signal providing element and being operative to direct light from the at least one optical signal providing element.

1 . An optical reflector apparatus for use in an electro-optic integrated circuit, the apparatus comprising:
 a first substrate having first and second substrate surfaces;   a micro-lens having a first curved portion, the micro-lens having first and second lens surfaces, wherein, the micro-lens is in contact with the first substrate surface at the first lens surface;   a reflective layer formed on the second lens surface of the micro-lens; and   a second substrate disposed over the reflective layer.   
   
   
       2 . The apparatus of  claim 1 , further comprising, an adhesive layer disposed between the second substrate and the reflective layer to attach the second substrate to the micro-lens. 
   
   
       3 . The apparatus of  claim 1 , wherein the reflective layer comprises a metallic layer or a dichroic mirror. 
   
   
       4 . The apparatus of  claim 1 , wherein the micro-lens and the first substrate are substantially optically transparent. 
   
   
       5 . The apparatus of  claim 3 , wherein, the micro-lens and the first substrate are substantially optically transparent for light of at least one wavelength substantially between 400 nm and 1650 nm. 
   
   
       6 . The apparatus of  claim 2 , wherein,
 the micro-lens and the reflective layer form a concave mirror; and   wherein the micro-lens is formed with photoresist.   
   
   
       7 . The apparatus of  claim 1 , wherein the first curved portion of the micro-lens is oriented to deflect an incident light beam. 
   
   
       8 . The apparatus of  claim 1 , wherein the first substrate comprises substantially of glass. 
   
   
       9 . The apparatus of  claim 1 , wherein, the second substrate comprises substantially of a heat-resistant material. 
   
   
       10 . The apparatus of  claim 11 , wherein the second substrate comprises, one or more of, glass, silicon, alumina and ceramic. 
   
   
       11 . The apparatus of  claim 1 , further comprising,
 a second reflective layer formed on the second substrate surface of the first substrate; and   wherein, the micro-lens is a micro-lens pair further comprising a second curved portion.   
   
   
       12 . The apparatus of  claim 11 , wherein, the second reflective layer is positioned to reflect light deflected from the first curved portion to the second curved portion of the micro-lens pair. 
   
   
       13 . The apparatus of  claim 11 , wherein the second reflective layer comprises gratings. 
   
   
       14 . An optical reflector apparatus, comprising:
 a first substrate having first and second substrate surfaces;   an array of a plurality of micro-lenses formed on the first substrate surface; and   a reflective layer disposed over the array of the plurality of micro-lenses.   
   
   
       15 . The apparatus of  claim 14 , wherein, the array of the plurality of micro-lens is oriented for deflection of incident light. 
   
   
       16 . The apparatus of  claim 14 , wherein, the deflection of the incident light generates an output light beam that is substantially perpendicular to the incident light. 
   
   
       17 . The apparatus of  claim 14 , wherein the plurality of micro-lens and the first substrate are optically transparent for light of at least one wavelength substantially between 400 nm and 1650 nm. 
   
   
       18 . The apparatus of  claim 14 , further comprising,
 a second substrate disposed over the reflective layer; and   an adhesive layer disposed between the second substrate and the reflective layer to attach the second substrate to the array of the plurality of microlenses.   
   
   
       19 . The apparatus of  claim 14 , wherein the first substrate comprises substantially of glass and the second substrate comprises substantially of a heat-resistant material. 
   
   
       20 . A method for forming an optical reflector, comprising:
 forming an array of micro-lenses on a first substrate;   depositing a reflective layer over the array of micro-lenses; and   sealing a second substrate to the metal layer using an adhesive layer to form an array of optical reflectors.   
   
   
       21 . The method of  claim 20 , further comprising, dicing the array of optical reflectors to form an individual optical reflector; wherein the individual optical reflector comprises at least one curved portion. 
   
   
       22 . The method of  claim 20 , wherein,
 the forming the array of micro-lenses comprises, using photolithography and thermal reflow; and   the metal layer is deposited using, one or more of, sputtering and evaporation.   
   
   
       23 . The method of  claim 20 , wherein,
 a micro-lens of the array of micro-lenses includes at least one curved portion;   the first substrate comprises substantially of glass and has a thickness between 200-400 micrometers; and   the second substrate comprises substantially of glass.