Photomask pod, photomask transport pod and supporter thereof

Abstract

A photomask pod and a photomask transport pod are provided for preventing particles in the environment from defiling a photomask as well as charge accumulation on the photomask from causing ESD damage. The photomask pod comprises two covers and the supporters or retainers on at least one of the two covers are made of a static dissipative material, which facilitates reducing charge accumulation and protecting the photomask from ESD damage.

1 . A photomask pod comprising:
 a first cover, and   a second cover, which is assembled to the first cover so as to enclose an inner space for accommodating at lease one photomask;   wherein at least one of the first and second covers has a body with a plurality of supporters or retainers at a surface facing the inner space, in which the supporters or retainers are made of a static dissipative material.   
   
   
       2 . The photomask pod of  claim 1  wherein the static dissipative material has a surface resistivity ranging from about 10 4  to about 10 11 Ω. 
   
   
       3 . The photomask pod of  claim 1  wherein the supporters and retainers are made of different materials. 
   
   
       4 . The photomask pod of  claim 1  wherein the supporters and retainers are made of an identical material. 
   
   
       5 . The photomask pod of  claim 1  wherein a conductive panel is provided at the surface of the body facing the inner space, and the supporters are deposited on the conductive panel and electrically connect with the conductive panel. 
   
   
       6 . The photomask pod of  claim 1  wherein the first cover or the second cover is made of metal. 
   
   
       7 . The photomask pod of  claim 1  wherein each of the supporters comprises:
 a planar base connecting with a first inclined surface that further connects with a second inclined surface so that the planar base, the first inclined surface and the second inclined surface form as the supporter integrally, and two first openings are provided near both lateral sides of the supporter wherein each of the first openings is equipped with an upper fastening piece and a lower fastening piece.   
   
   
       8 . The photomask pod of  claim 1  wherein each of the supporters comprises:
 a base, which affixes to each corners of the upper cover of the photomask pod via a plurality of supporting points, and   a flexible bent component, having one end which connects to the base and has an opposing end flexibly suspending between the plurality of supporting points, which further comprises a propping surface and a pressing surface;   wherein when the photomask pod encloses a photomask, the propping surface and the pressing surface of the flexible bent component contact the photomask so as to fix it.   
   
   
       9 . The photomask pod of  claim 1  wherein the photomask pod can also be a photomask transport pod. 
   
   
       10 . A photomask pod comprising:
 a first cover,   a second cover, which is assembled to the first cover so as to enclose an inner space for accommodating at least one photomask and at least one of the first and second covers has a body,   a plurality of retainers, which is provided at a surface of the body facing the inner space, and   a plurality of supporters, which is provided at the surface of the body facing the inner space and made of a static dissipative material;   wherein the plurality of retainers and the plurality of supporters are formed by multi-component injection molding method and then combined mutually.   
   
   
       11 . The photomask pod of  claim 10  wherein the static dissipative material has a surface resistivity ranging from about 10 4  to about 10 11 Ω. 
   
   
       12 . The photomask pod of  claim 10  wherein the photomask pod can also be a photomask transport pod. 
   
   
       13 . A supporter comprising:
 a planar base connecting with a first inclined surface that further connects with a second inclined surface so that the planar base, the first inclined surface, and second inclined surface form as the supporter integrally, and two first openings are provided near both lateral sides of the supporter and each of the first openings is equipped with an upper fastening piece and a lower fastening piece wherein the supporter is partially or entirely made of a static dissipative material.   
   
   
       14 . The supporter of  claim 13  wherein the static dissipative material has a surface resistivity ranging from about 10 4  to about 10 11 Ω. 
   
   
       15 . The supporter of  claim 14  wherein the static dissipative material is polyetheretherketone. 
   
   
       16 . A supporter comprising:
 a base, which affixes to each corner of an upper cover of a photomask pod via a plurality of supporting points, and   a flexible bent component, which has one end connecting to the base and an opposing end flexibly suspending upon the plurality of supporting points, which further comprises a propping surface and a pressing surface;   wherein when the photomask transport pod encloses a photomask, the propping surface and the pressing surface of the flexible bent component contact the photomask so as to fix it, in which the supporter is partially or entirely made of a static dissipative material.   
   
   
       17 . The supporter of  claim 16  wherein the static dissipative material has a surface resistivity ranging from about 10 4  to about 10 11 Ω. 
   
   
       18 . The supporter of  claim 17  wherein the static dissipative material is polyetheretherketone.