Vacuum pump arrangement

Abstract

A vacuum pump arrangement, especially a turbomolecular pump arrangement, comprises a rotor ( 14 ) and a stator ( 16 ) in a pump housing ( 10 ). The pump housing ( 10 ) is connected to a vacuum chamber housing ( 26 ) through a pump flange ( 10 ). Retaining elements ( 34 ) are provided for this connection. To avoid a twisting of the retaining elements ( 34 ) in the event of a damage, such as the blocking of the rotor ( 14 ) and the high moments occurring thereby, the retaining element ( 34 ) comprises an anti-twist structure ( 40 ) cooperating with the vacuum chamber housing ( 26 ).

1 . A vacuum pump arrangement, comprising:
 a rotor and a stator, both arranged in a pump housing,   a pump flange connected to the pump housing, and   at least one retaining element connected to the pump housing and to a vacuum chamber housing for fastening the pump housing to the vacuum chamber housing,   the retaining element being connected to an anti-twist means cooperating with the vacuum chamber housing.   
   
   
       2 . The vacuum pump arrangement of  claim 1 , wherein the anti-twist means engages a recess provided in the vacuum chamber housing. 
   
   
       3 . The vacuum pump arrangement of  claim 1 , wherein the retaining element comprises a fastening element provided in addition to the anti-twist means. 
   
   
       4 . The vacuum pump arrangement of  claim 1 , wherein the anti-twist means is additionally designed as another fastening element. 
   
   
       5 . The vacuum pump arrangement of  claim 1 , wherein at least three retaining elements are provided along the circumference of the pump flange. 
   
   
       6 . The vacuum pump arrangement of  claim 1 , wherein the pump flange has a groove in which engages a projection of the retaining element. 
   
   
       7 . The vacuum pump arrangement of  claim 1 , wherein the vacuum pump arrangement includes a turbomolecular vacuum pump arrangement. 
   
   
       8 . The vacuum pump arrangement of  claim 5 , wherein the pump flange is annular. 
   
   
       9 . The vacuum pump arrangement of  claim 8 , wherein the annular flange defines an annular groove. 
   
   
       10 . The vacuum pump arrangement of  claim 9 , wherein the retaining element includes a ring segment-shaped projection that is received in the annular groove. 
   
   
       11 . A vacuum pump comprising:
 a pump housing;   a rotor and a stator disposed in the pump housing;   an annular flange extending from the pump housing, the flange having:   a vacuum chamber engaging face, and   an annular groove defined in a face opposite to the vacuum chamber receiving face.   
   
   
       12 . The vacuum pump of  claim 11 , further including:
 at least one retaining element for engaging the face of the annular flange opposite the vacuum chamber, the retaining element having a fastening element for fastening the retaining element with the vacuum chamber and an anti-twist element which blocks the retaining element from rotating around the fastening element.   
   
   
       13 . The vacuum pump of  claim 12 , wherein the retaining element includes an arcuate projection that is received in the flange annular channel. 
   
   
       14 . A retaining element for retaining the vacuum pump of  claim 11  to a vacuum chamber, the retaining element including:
 an arcuate leg that engages the face of the annular flange opposite to the vacuum chamber;   an arcuate projection extending from the arcuate leg to engage the annular groove;   an aperture which receives a fastening element; and   an anti-twist structure that cooperates with a vacuum chamber housing to block the retaining element from rotating around the fastening element in response to high moments resulting from a vacuum pump failure.