Process for Treating Perfluorides

Abstract

According to a process for treating perfluorides in which a perfluoride treatment undertaker carries out decomposition treatment of perfluorides discharged from a manufacturing plant by using a perfluoride treating apparatus connected to said manufacturing plant, and the cost of treatment of perfluorides calculated according to the amount of perfluorides treated by said perfluoride treating apparatus is communicated to the owner of said manufacturing plant, it is possible to reduce the cost required for the decomposition treatment of perfluorides which cost is to be defrayed by the product manufacturer.

1 - 17 . (canceled) 
   
   
       18 . A process for estimating the amount of perfluoride gases treated by a perfluoride treatment undertaker using a perfluoride treating apparatus connected by pipes to a plurality of semiconductor manufacturing plants comprising.
 supplying a wafer from a wafer supplying device to at least one of a plurality of semiconductor manufacturing plants;   counting the number of wafers supplied;   supplying perfluoride gases into the at least one of a plurality of semiconductor manufacturing plants;   treating the supplied perfluoride gases by the perfluoride treatment undertaker to obtain treated perfluoride gases; and   estimating the amount of the treated perfluoride gases based on the number of wafers counted.