Method and Apparatus for Simultaneous Detection and Measurement of Charged Particles at One or More Levels of Particle Flux for Analysis of Same

Abstract

A charged particle detector and method are disclosed providing for simultaneous detection and measurement of charged particles at one or more levels of particle flux in a measurement cycle. The detector provides multiple and independently selectable levels of integration and/or gain in a fully addressable readout manner.

1 . A method, comprising the steps:
 providing two or more detector elements operatively disposed for detecting and measuring different and/or separated charged particles, said detector elements each comprising an independently selectable and addressable charge-collecting element operatively disposed to an amplifying circuit, wherein said amplifying circuit comprises an integrating amplifier with one or more integrating capacitors and individually selectable switching means thereby providing independently selectable and variable integration and/or gain to each of said detector elements;   reading each of said charge-collecting elements at an initial level of particle flux;   adjusting the gain of said charge-collecting elements selectively and variably providing sufficient charge-collecting capability for each of said charge-collecting elements at one or more levels of particle flux; and   whereby said detector elements are each independently selectable and addressable thereby providing for simultaneous detection and measurement of said charged particles at one or more levels of particle flux in a measurement cycle.   
   
   
       2 . A method of  claim 1 , wherein said charged particles are selected from the group consisting of ions, electrons, positrons, alpha particles, aerosols, droplets, particulates, or combinations thereof. 
   
   
       3 . A method of  claim 1 , wherein said charged particles are net positive. 
   
   
       4 . A method of  claim 1 , wherein said charged particles are net negative. 
   
   
       5 . A method of  claim 1 , wherein said charge-collecting elements are disposed in an array. 
   
   
       6 . A method of  claim 5 , wherein said array is a linear array. 
   
   
       7 . A method of  claim 5 , wherein said array is a curvilinear array. 
   
   
       8 . A method of  claim 5 , wherein said array is a 2-dimensional array. 
   
   
       9 . A method of  claim 5 , wherein said array is a 3-dimensional array. 
   
   
       10 . A method of  claim 5 , wherein said charge-collecting elements are composed of an electrically conductive material. 
   
   
       11 . A method of  claim 10 , wherein said electrically conductive material is selected from the group consisting of alloy, single, mixed, layered, binary, or combinations thereof. 
   
   
       12 . A method of  claim 1 , wherein said amplifying circuit is a charge-integrating amplifying circuit. 
   
   
       13 . A method of  claim 12 , wherein said charge-integrating amplifying circuit is a capacitive transimpedance amplifying circuit. 
   
   
       14 . A method of  claim 12 , wherein said charge-integrating amplifying circuit comprises two or more selectable charge-integrating capacitors. 
   
   
       15 . A method of  claim 14 , wherein said charge-integrating capacitors are fixed capacitors. 
   
   
       16 . A method of  claim 14 , wherein said charge-integrating capacitors are variable capacitors. 
   
   
       17 . A method of  claim 1 , further comprising a readout means operatively disposed for reading charges accumulated in said two or more detector elements. 
   
   
       18 . A method of  claim 17 , wherein said readout means reads charges accumulated in said two or more detector elements simultaneously, sequentially, non-sequentially, selectively, randomly and/or independently, in parallel, non-destructively, destructively, or combinations thereof. 
   
   
       19 . A method of  claim 17 , wherein said reading at said one or more levels of particle flux is sequential. 
   
   
       20 . A method of  claim 17 , wherein said reading at said one or more levels of particle flux is non-sequential. 
   
   
       21 . A method of  claim 17 , wherein the reading of charges by said readout means is non-destructive. 
   
   
       22 . A method of  claim 17 , wherein the reading of charges by said readout means is destructive. 
   
   
       23 . A method of  claim 1 , further comprising a resetting means operatively disposed for discharging charges accumulated in each of said two or more detector elements providing zero net charge therein. 
   
   
       24 . A method of  claim 1 , further comprising a storage means for storing data representative of charges accumulated in each of said two or more detector elements. 
   
   
       25 . A method of  claim 1 , further comprising a switching multiplexer operatively disposed to a computing means for automated selection and operation of said switching multiplexer. 
   
   
       26 . A method of  claim 25 , wherein said switching multiplexer is disposed discretely or as a hybrid with said two or more detector elements. 
   
   
       27 . A method of  claim 25 , wherein said switching multiplexer is disposed monolithically or is fully integrated with said two or more detector elements. 
   
   
       28 . A method of  claim 1 , wherein said switching multiplexer includes members selected from the group consisting of selectable switch, polarity switch, resetting switch, read-out switch, charge-integrating capacitor, or combinations thereof. 
   
   
       29 . A method of  claim 1 , wherein said measurement cycle is a single measurement cycle. 
   
   
       30 . A method of  claim 1 , wherein said measurement cycle is a repetitive measurement cycle. 
   
   
       31 . A method of  claim 1 , wherein said measurement cycle is a repeatable measurement cycle.