Storage apparatus

Abstract

The present invention provides a storage apparatus for storing a semiconductor element or a reticle and having a filter therein. The storage apparatus includes a first cover and a second cover, which are assembled together to form an inner space therebetween for accommodating a reticle or a semiconductor element. The second cover of the storage apparatus is composed of a body and a plate. Further, the second cover includes at least one aperture for communicating the inner space and an outer of the storage apparatus. The plate has a corresponding portion positionally corresponding to the aperture of the body. The filter is sandwiched between the body and the plate and covered the aperture so that when the air passes through the aperture of the body, the filter can filter and rid the air of impurities.

1 . A storage apparatus, comprising:
 a first cover;   a second cover for being assembled with the first cover to form an inner space therebetween for accommodating the semiconductor element or the reticle, and comprising:
 a body, having at least one aperture; and 
 a plate, is deposited on the body and facing the inner space, having a corresponding portion positionally corresponding to the aperture of the body; and 
   a filter, sandwiched between the body and the plate and covering the aperture of the body.   
   
   
       2 . The storage apparatus of  claim 1 , further comprising a fixing element for fixing the filter between the body and the plate. 
   
   
       3 . The storage apparatus of  claim 2 , wherein the fixing element has at least one venthole for ventilation. 
   
   
       4 . The storage apparatus of  claim 2 , wherein the fixing element covers the filter. 
   
   
       5 . The storage apparatus of  claim 2 , wherein the fixing element frames the filter. 
   
   
       6 . The storage apparatus of  claim 2 , wherein the fixing element enveloped the entire filter. 
   
   
       7 . The storage apparatus of  claim 2 , wherein the fixing element further comprising an airtight device. 
   
   
       8 . The storage apparatus of  claim 7 , wherein the airtight device encircles the fixing element. 
   
   
       9 . The storage apparatus of  claim 7 , wherein the airtight device encircles the aperture. 
   
   
       10 . The storage apparatus of  claim 7 , wherein the airtight device is a soft plastic component. 
   
   
       11 . The storage apparatus of  claim 2 , wherein the fixing element has a protrude top. 
   
   
       12 . The storage apparatus of  claim 1 , wherein the corresponding portion of the plate is a tongue so as to be propped up by the protrude top of the fixing element. 
   
   
       13 . The storage apparatus of  claim 2 , wherein the fixing element is a vent valve. 
   
   
       14 . The storage apparatus of  claim 2 , wherein the fixing element has an annular structure. 
   
   
       15 . The storage apparatus of  claim 1 , wherein the plate has a flat first surface and the corresponding portion of the plate is raised from, depressed from or coplanar with the first surface. 
   
   
       16 . The storage apparatus of  claim 1 , wherein corresponding portion of the plate has at least one gap.