Multifunction abrasive tool with hybrid bond

Abstract

Abrasive tools and techniques are disclosed that can cut hard, brittle materials to relatively precise dimensions. The tools, which can include a hybrid bond of metal or metal alloy and a resin matrix together with fine abrasive grits, can be employed, for example, in mirror finish cutting applications, thereby enabling ‘1×’ or ‘single-pass’ multi-function abrasive processes. The specific selection of resin and metal or metal alloy types is such that the tool is sufficiently brittle for the purpose of manufacture and durability, but ductile enough to withstand the grinding and handling stresses (an exemplary hybrid bond includes bronze and polyimide). Numerous tool types and applications will be apparent in light of this disclosure, including abrasive products for electronic device manufacturing such as thin 1A8 blades (single blade or multi-blade configuration).

1 . A multifunction abrasive tool, comprising:
 a hybrid bond of a bronze and a polyimide; and   a plurality of fine abrasive grits blended with the hybrid bond;   wherein the tool has a substantially uniform thickness of 250 microns or less.   
   
   
       2 . The multifunction abrasive tool of  claim 1 , wherein the tool is a 1A8 type wheel or a 1A1 type wheel, having a thickness of about 100 microns or less. 
   
   
       3 . The multifunction abrasive tool of  claim 1 , having a substantially uniform thickness of about 65 microns or less. 
   
   
       4 . The multifunction abrasive tool of  claim 1 , wherein the tool includes about 1 to 50 volume percent (vol %) of polyimide, about 40 to 85 vol % of bronze, and about 5 to 40 vol % of fine abrasive grits. 
   
   
       5 . The multifimction abrasive tool of  claim 4 , wherein the tool includes about 10 to 40 vol % of polyimide, about 45 to 75 vol % of bronze, and about 10 to 25 vol % of fine abrasive grits. 
   
   
       6 . The multifunction abrasive tool of  claim 5 , wherein the tool includes about 11.25 vol % of polyimide, about 70 vol % of bronze, and about 18.75 vol % of fine abrasive grits, with each component having a tolerance of ±/−20%. 
   
   
       7 . The multifunction abrasive tool of any one of  claim 1 , wherein the bronze consists essentially of 60/40 to 40/60 by weight of copper and tin. 
   
   
       8 . The multifunction abrasive tool of  claim 1 , wherein the polyimide consists essentially of particles having an average diameter of about 40 microns or less. 
   
   
       9 . The multifunction abrasive tool of  claim 1 , wherein the bronze consists essentially of particles having an average diameter of about 40 microns or less. 
   
   
       10 . The multifunction abrasive tool of  claim 1 , wherein the fine abrasive grits consist essentially of diamonds having an average diameter of about 40 microns or less. 
   
   
       11 . The multifunction abrasive tool of  claim 10 , wherein the diamonds have an average diameter of about 1 to 12 microns. 
   
   
       12 . The multifunction abrasive tool of  claim 11 , wherein the diamonds have an average diameter of about 1 to 3 microns. 
   
   
       13 . The multifunction abrasive tool of any one of  claim 1 , wherein the polyimide is Vespel® SP1 polyimide. 
   
   
       14 . The multifunction abrasive tool of  claim 1 , wherein the polyimide is Meldin 7001® polyimide. 
   
   
       15 . The multifunction abrasive tool of  claim 1 , wherein the tool is included in a multi-blade configuration that includes a plurality of such tools in a gang-like configuration. 
   
   
       16 . An abrasive tool, comprising:
 a hybrid bond of a metal or metal alloy and a resin associated with a softening temperature less than 500° C., wherein the metal or metal alloy has a liquid phase or transient liquid phase at the softening temperature of the resin and a fracture toughness between 1 and 5 MPa.m 0.5  at room temperature,; and   a plurality of fine abrasive grits blended with the hybrid bond;   wherein the tool has a substantially uniform thickness of 250 microns or less.   
   
   
       17 . The abrasive tool of  claim 16 , wherein the softening temperature is a Heat Deflection Temperature as measured by ASTM standard D648, and is in the range of 160 to 400° C. 
   
   
       18 . The abrasive tool of  claim 16 , wherein the resin has a ductility in the range of about 3% to 25%. 
   
   
       19 . The abrasive tool of  claim 16 , wherein the metal or metal alloy is a bronze 
   
   
       20 . The abrasive tool of  claim 16 , wherein the resin is a polyimide.