Slide valve apparatus and method of manufacturing slide valve apparatus

Abstract

A slide valve apparatus includes a first member having a first fluid channel for allowing a fluid to flow therethrough, a second member sliding along the first member and having a second fluid channel formed in a manner to communicate with the first fluid channel, and a first elastic membrane formed in the sliding surface along which the second member and the first member slide relative to each other and having a first communicating hole communicating with the first fluid channel. In manufacturing the slide valve apparatus, a gas is spurted from the open edge of the first fluid channel in at least a stage between the start up of the step of forming the elastic membrane and the end of the step of baking the elastic membrane so as to form in the elastic membrane the communicating hole communicating with the first fluid channel.

1 . A method of manufacturing a slide valve apparatus, comprising:
 forming an elastic membrane on a surface of a first member, the first member having a first fluid channel in which a fluid flows and the surface having an opening communicating with the first fluid channel, and   baking the elastic membrane,   flowing a gas through the first fluid channel and spurting the gas from the opening in a predetermined period during the forming of the elastic membrane or the baking of the elastic membrane.   
   
   
       2 . The method of manufacturing a slide valve apparatus according to  claim 1 , further comprising polishing the surface of the elastic membrane after the baking of the elastic membrane. 
   
   
       3 . A method of manufacturing a slide valve apparatus, comprising:
 forming a first member having a sample port, a first cutout surface having a first opening, and a first fluid channel which communicates the sample port to the first opening, and is so formed in the first member as to allow a flow of fluid;   forming a second member having a second fluid channel formed therein and a second cutout surface having a second opening communicating with the second fluid channel, wherein the second cutout surface is so formed as to capable of being slid on the first cutout surface, and the second opening is so formed on the second cutout surface as to be aligned with the first opening so that the second fluid channel is communicated with the first fluid channel through the first and second openings;   coating a first elastic member on the first cutout surface to form a first elastic membrane having a first communicating opening communicated with the first fluid channel through the first opening, and backing the first elastic membrane, wherein a gas is introduced into the first fluid channel through the sample port, and blows off from the first communicating opening through the first opening in the backing of the first elastic membrane to maintain the first communicating opening.   
   
   
       4 . The method of manufacturing a slide valve apparatus according to  claim 3 , wherein the backing the first elastic membrane includes preparing a gas introducing tool having a packing part which is so contacted on a surface region of the first member as to form a closed space on the first communicating opening, and the gas is introduced into the closed space from the gas introducing tool and is guided into the first fluid channel. 
   
   
       5 . The method of manufacturing a slide valve apparatus according to  claim 3 , wherein the coating of the first elastic member includes preparing a gas introducing tool having a packing part which is so contacted on a surface region of the first member as to form a closed space on the first communicating opening, and the gas is introduced into the closed space from the gas introducing tool and is guided into the first fluid channel in the coating of the first elastic member. 
   
   
       6 . The method of manufacturing a slide valve apparatus according to  claim 3 , further comprising:
 coating a second elastic member on the second cutout surface to form a second elastic membrane having a second communicating opening communicated with the second fluid channel through the second opening, and backing the first elastic membrane, wherein the gas is introduced into the second fluid channel through the sample port, and blows off from the first communicating opening through the second opening in the backing of the second elastic membrane to maintain the second communicating opening.   
   
   
       7 . The method of manufacturing a slide valve apparatus according to  claim 3 , further comprising:
 polishing the first elastic member after the backing of the first elastic membrane in such a manner that the second member is slidably contacted on the first elastic member.   
   
   
       8 . The method of manufacturing a slide valve apparatus according to  claim 7 , wherein the first elastic member is made of fluroplastic material. 
   
   
       9 . The method of manufacturing a slide valve apparatus according to  claim 6 , further comprising:
 polishing the second elastic member after the backing of the second elastic membrane in such a manner that the first member is slidably contacted on the first elastic member.   
   
   
       10 . The method of manufacturing a slide valve apparatus according to  claim 9 , wherein the second elastic member is made of fluroplastic material.