Piezoelectric device, process for producing the piezoelectric device, and inkjet recording head

Abstract

A process for producing a piezoelectric device constituted by a first electrode, at least one second electrode, and a piezoelectric film sandwiched between the first electrode and the at least one second electrode so that an electric field can be applied to the piezoelectric film. First, a seed layer of a material containing at least one element is formed on a substrate, and then the first electrode is formed on the seed layer. Next, the at least one element is diffused through the first electrode so that the at least one element precipitates on a surface of the first electrode on the opposite side to the seed layer, and then the piezoelectric film is formed on the first electrode.

1 - 14 . (canceled) 
   
   
       15 . An inkjet recording head comprising:
 a piezoelectric device constituted by a first electrode, at least one second electrode, and a piezoelectric film sandwiched between the first electrode and the at least one second electrode so that an electric field can be applied to the piezoelectric film, the piezoelectric device being produced by
 forming on a substrate a seed layer of a material containing at least one element; 
 forming said first electrode on said seed layer; 
 diffusing said at least one element though said first electrode so that the at least one element precipitates on a surface of the first electrode one a side opposite to the said seed layer; and 
 forming said piezoelectric film on said first electrode; and 
   an ink hold-and-discharge member being attached to said piezoelectric device and having,
 one or more ink chambers which hold ink, and 
 one or more ink outlets through which said ink is externally discharged from said one or more ink chambers. 
   
   
   
       16 . An inkjet recording apparatus comprising said inkjet recording head according to  claim 15 . 
   
   
       17 . A piezoelectric device comprising:
 a substrate;   a first electrode formed over said substrate;   a piezoelectric film formed on said first electrode; and   at least one second electrode formed on said piezoelectric film;
 said piezoelectric film is sandwiched between said first electrode and said at least one second electrode so that an electric field an be applied to the piezoelectric film, at least one element constituting the piezoelectric film precipitates on a surface of the first electrode on a side opposite to the said substrate, and the surface has an arithmetic average surface roughness (Ra) of 0.5 to 30 nm. 
   
   
   
       18 . A piezoelectric device according to  claim 17 , wherein said piezoelectric film has a piezoelectric constant d 31  of 150 pm/V or greater. 
   
   
       19 . An inkjet recording head comprising:
 said piezoelectric device according to  claim 17 ; and   an ink hold-and-discharge member being attached to said piezoelectric device and having,
 one or more ink chambers which hold ink, and 
 one or more ink outlets through which said ink is externally discharged from said one or more ink chambers. 
   
   
   
       20 . An inkjet recording apparatus comprising said inkjet recording head according to  claim 19 .