Film forming apparatus and film forming method

Abstract

A film forming apparatus is provided which includes a device A that generates liquid fine particles having controlled particle diameters; a device B including a via for guiding the generated liquid fine particles while controlling a temperature thereof; a device C that sprays the guided liquid fine particles; and a device D including a space for forming a transparent conductive film by coating the sprayed liquid fine particles onto a subject to be processed.

1 . A film forming apparatus, comprising:
 a supporting device on which a subject to be processed is mounted; and   a discharging device that sprays a mist containing a raw material solution for the thin film towards a surface of the subject to be processed, wherein   the discharge device comprises nozzles, each nozzle having a mist intake side and a mist discharge side, and   if a face velocity at the mist intake side is taken as V 1  and a face velocity at the mist discharge side is taken as V 2 , a face velocity of the mist moving through the nozzles is V 2 >1.5×V 1 .   
     
     
         2 . The film forming apparatus according to  claim 1 , wherein, in the nozzles, if a cross-sectional area of the mist intake side when seen from the discharge aperture side is taken as E 1  and a cross-sectional area of the mist discharge side is taken as E 2 , E 1 >1.5×E 2 . 
     
     
         3 . The film forming apparatus according to  claim 1 , wherein, in the nozzles, the mist discharge side has a slit shape. 
     
     
         4 . The film forming apparatus according to  claim 1 , further comprising:
 a preparation chamber in which mist is generated by spraying a raw material solution; and   a transporting device defined by a via that enables the mist to move from the preparation chamber to the nozzles.   
     
     
         5 . The film forming apparatus according to  claim 1 , wherein, during film formation, the nozzles are positionable in a horizontal direction relative to a surface of the subject to be processed. 
     
     
         6 . The film forming apparatus according to  claim 5 , wherein, during film formation, the nozzles are moveable in a substantially horizontal reciprocating movement, wherein the nozzles are shifted in a direction in which they move toward and away from the surface of the subject to be processed.