Vacuum vapor desposition apparatus

Abstract

A crucible is a monolithic structure extending over an entire area of a vaporizing chamber and has at least one slit groove provided in the upper surface thereof. The at least one slit groove has a length from one end of the upper surface of the crucible to other end thereof. The at least one slit groove is used as a portion for containing the evaporation material (dopant material or the like). Alternatively, a crucible is a monolithic structure extending over the entire area of the vaporizing chamber and has a plurality of holes provided in the upper surface thereof. The holes are used as portions for containing the evaporation material. Further, the crucible is divided into a plurality of regions, and individual electric heaters are provided under the lower surface of the crucible for the respective regions, whereby temperature can be individually controlled for the respective regions by the electric heaters.

1 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a monolithic structure extending over an entire area of the vaporizing chamber and having a plurality of grooves in an upper surface thereof, and the grooves having lengths from one end of the upper surface of the crucible to the other end thereof and serving as portions for containing the evaporation material,
 the method, comprising:   dividing the crucible is divided into a plurality of regions;   providing individual heating means provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       2 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a monolithic structure extending over an entire area of the vaporizing chamber and having only one groove in an upper surface thereof, and the groove having a length from one end of the upper surface of the crucible to the other end thereof and serving as a portion for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       3 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a plurality of pieces arranged in a cluster to extend over an entire area of the vaporizing chamber and having a plurality of grooves in an upper surface thereof, and the grooves having lengths from one end of the upper surface of the crucible to the other end thereof and serving as portions for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       4 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of any of a monolithic structure extending over an entire area of the vaporizing chamber and a plurality of pieces being arranged in a cluster to extend over the entire area of the vaporizing chamber and having a plurality of bottomed openings in an upper surface thereof, and the bottomed openings serving as portions for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       5 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a monolithic structure extending over an entire area of the vaporizing chamber, having a long narrow shape extending along a width direction of the workpiece, and having at least one groove in an upper surface thereof; and the at least one groove extending along a longitudinal direction of the crucible and serving as a portion for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions at least in the longitudinal direction, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       6 . A method of manufacturing a thin film of an organic electroluminescence element using a vacuum vapor deposition apparatus in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a monolithic structure extending over an entire area of the vaporizing chamber, having a long narrow shape extending along a width direction of the workpiece, and having a plurality of grooves in an upper surface thereof; and the grooves extending along a direction perpendicular to a longitudinal direction of the crucible and serving as portions for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions at least in the longitudinal direction, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.   
   
   
       7 . A method of depositing vacuum vapor in which an evaporation material is contained in a crucible provided in a vaporizing chamber and hot walls being side walls of the vaporizing chamber heat the evaporation material by radiant heat from the hot walls to vaporize the evaporation material and thereby the evaporation material is deposited on a surface of a workpiece to form a thin film, the crucible being comprised of a monolithic structure extending over an entire area of the vaporizing chamber, having a long narrow shape extending along a width direction of the workpiece, and having a plurality of bottomed openings in an upper surface thereof; and the bottomed openings serving as portions for containing the evaporation material,
 the method, comprising:   dividing the crucible into a plurality of regions at least in the longitudinal direction, individual heating means are provided under a lower surface of the crucible for the respective regions, and thus temperature can be individually controlled for the respective regions by the heating means;   using an organic material as the evaporation material;   measuring temperatures for the respective regions of the crucible; and   controlling outputs of each of the individual heating means individually based on the measured temperatures of the respective regions so that the temperatures of the respective regions become constant.