US2009180890A1PendingUtilityA1

Rotors or stators of a turbomolecular pump

Assignee: OERLIKON LEYBOLD VACUUM GMBHPriority: Apr 29, 2006Filed: Apr 27, 2007Published: Jul 16, 2009
Est. expiryApr 29, 2026(expired)· nominal 20-yr term from priority
F04D 19/042C22C 21/14F04D 29/023F04D 29/321F05D 2300/173Y10T29/49325
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Claims

Abstract

The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.

Claims

exact text as granted — not AI-modified
1 . Rotors or stators of a turbomolecular pump with rotor blades made of an aluminum alloy, characterized in that said alloy comprises an Al—Cu—Mg—Mn wrought alloy. 
   
   
       2 . The rotors or stators according to  claim 1 , characterized by comprising a wrought alloy having the following composition:
 from 0.3 to 0.7% by weight of silicon (Si);   up to 0.15% by weight of iron (Fe);   from 3.5 to 4.5% by weight of copper (Cu);   from 0.1 to 0.5% by weight of manganese (Mn);   from 0.3 to 0.8% by weight of magnesium (Mg);   from 0.05 to 0.15% by weight of titanium (Ti);   from 0.1 to 0.25% by weight of zirconium (Zr);   from 0.3 to 0.7% by weight of silver (Ag);   up to 0.05% by weight of others individually;   up to 0.15% by weight of others in total; and   aluminum (Al) as the % by weight balance.

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