US2009180890A1PendingUtilityA1
Rotors or stators of a turbomolecular pump
Assignee: OERLIKON LEYBOLD VACUUM GMBHPriority: Apr 29, 2006Filed: Apr 27, 2007Published: Jul 16, 2009
Est. expiryApr 29, 2026(expired)· nominal 20-yr term from priority
Inventors:Rainer HölzerMichael FroitzheimLars EtschenbergIshan RothGernot FischerDieter SauerGregor Terlinde
F04D 19/042C22C 21/14F04D 29/023F04D 29/321F05D 2300/173Y10T29/49325
44
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Claims
Abstract
The invention relates to rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.
Claims
exact text as granted — not AI-modified1 . Rotors or stators of a turbomolecular pump with rotor blades made of an aluminum alloy, characterized in that said alloy comprises an Al—Cu—Mg—Mn wrought alloy.
2 . The rotors or stators according to claim 1 , characterized by comprising a wrought alloy having the following composition:
from 0.3 to 0.7% by weight of silicon (Si); up to 0.15% by weight of iron (Fe); from 3.5 to 4.5% by weight of copper (Cu); from 0.1 to 0.5% by weight of manganese (Mn); from 0.3 to 0.8% by weight of magnesium (Mg); from 0.05 to 0.15% by weight of titanium (Ti); from 0.1 to 0.25% by weight of zirconium (Zr); from 0.3 to 0.7% by weight of silver (Ag); up to 0.05% by weight of others individually; up to 0.15% by weight of others in total; and aluminum (Al) as the % by weight balance.Join the waitlist — get patent alerts
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