Gas filling apparatus and gas filling port thereof

Abstract

A gas filling apparatus for connecting a gas feeding device to introduce a gas into a storage apparatus for storing a semiconductor element or a reticle comprises a base and at least one gas filling port, in which the gas filling port comprises a foundation, an elastic element and a fixing element for fixing the elastic element.

1 . A gas filling apparatus for being connected with a gas filling device so as to introduce a gas into a storage apparatus for storing a semiconductor element or a reticle, wherein the storage apparatus comprises at least one gas entrance and the gas filling apparatus comprises:
 at least one base for receiving the storage apparatus; and   at least one gas filling port, which is settled on the base and positionally corresponding to the gas inlet port of the storage apparatus, and comprises:
 a foundation, having a through hole for allowing the gas to pass through; 
 an elastic element, deposited on the foundation and positionally corresponding to a contacting portion of the gas inlet port for airtight; and 
 a fixing element, settled on the foundation for fixing the elastic element. 
   
   
   
       2 . The gas filling apparatus of  claim 1 , wherein the foundation of the gas filling port further comprises a fixing element that is combined with the base by at least one fastening element. 
   
   
       3 . The gas filling apparatus of  claim 2 , wherein the fixing element has a fastening head and the gas filling port further comprises an elastic device settled between the fastening head of the fixing element and the foundation so as to allow the gas filling port to be elastically adjusted with respect to the base. 
   
   
       4 . The gas filling apparatus of  claim 1 , wherein a contacting portion on the elastic element of the gas filling port for contacting the gas entrance of the storage apparatus is formed as an arched surface. 
   
   
       5 . The gas filling apparatus of  claim 1 , wherein a contacting portion on the elastic element of the gas filling port for contacting the gas inlet port of the storage apparatus is formed as a plane surface. 
   
   
       6 . The gas filling apparatus of  claim 1 , wherein the fixing element of the gas filling port engages with the foundation by a hooking means. 
   
   
       7 . The gas filling apparatus of  claim 1 , wherein the fixing element of the gas filling port engages with the foundation by a screwing means. 
   
   
       8 . The gas filling apparatus of  claim 1 , wherein the foundation of the gas filling port further comprises an adjuster for adjusting an gap between the base and the foundation. 
   
   
       9 . The gas filling apparatus of  claim 8 , wherein the adjuster is formed with at least one hole for combining the foundation and the base. 
   
   
       10 . The gas filling apparatus of  claim 8 , wherein the adjuster is formed with at least one hole for reducing a weight of the adjuster. 
   
   
       11 . A gas filling port, settled on a base of a gas filling apparatus, wherein the gas filling apparatus serves to introduce a gas into a storage apparatus that is placed on the base and is for storing a semiconductor element or a reticle, in which the storage apparatus has at least one gas entrance, and comprising:
 a foundation, having a through hole for allowing the gas to pass through;   an elastic element, deposited on the foundation and positionally corresponding to a contacting portion of the gas entrance for airtight; and   a fixing element, settled on the foundation for fixing the elastic element.   
   
   
       12 . The gas filling port of  claim 11 , wherein the foundation of the gas filling port further comprises a fastening portion that is combined with the base by at least one fixing element. 
   
   
       13 . The gas filling port of  claim 12 , wherein the fixing element has a fastening head and the gas filling port further comprises an elastic device settled between the fastening head of the fastening element and the foundation so as to allow the gas filling port to be elastically adjusted with respect to the base. 
   
   
       14 . The gas filling port of  claim 11 , wherein a contacting portion on the elastic element for contacting the gas entrance of the storage apparatus is formed as an arched surface. 
   
   
       15 . The gas filling port of  claim 11 , wherein a contacting portion on the elastic element for contacting the gas inlet port of the storage apparatus is formed as a plane surface. 
   
   
       16 . The gas filling port of  claim 11 , wherein the fixing element engages with the foundation by a hooking means. 
   
   
       17 . The gas filling port of  claim 11 , wherein the fixing element engages with the foundation by a screwing means. 
   
   
       18 . The gas filling port of  claim 11 , wherein the foundation further comprises an adjuster. 
   
   
       19 . The gas filling port of  claim 18 , wherein the adjuster is formed with at least one hole for combining the foundation and the base. 
   
   
       20 . The gas filling port of  claim 18 , wherein the adjuster is formed with at least one hole for reducing a weight of the adjuster.