Methods for implement microscopy and microscopic measurement as well as microscope and apparatus for implementing them

Abstract

The invention relates to a microscope that enables a phase object or surface pits and projections to be observed at a relatively low image-formation magnification of 4 or lower over a wide viewing range yet in a relatively narrow spatial frequency distribution range. The microscope comprises a light source 2 , an illumination optical system 3 for guiding light from the light source 2 to an object 4 under observation, a partial aperture located substantially at the pupil position 28 of the illumination optical system 3 and an image-formation optical system 15, 16, 18 for forming on the image-formation plane 19 an image 4 of the object under observation illuminated by light passing through the partial aperture, and further comprises an eyepiece optical system 6 or an image pickup optical system for viewing the image formed on the image-formation plane 19 . The diameter of the image of said partial aperture at the pupil position 30 of the image-formation optical system is set smaller than the pupil diameter of the image-formation optical system, and at the pupil position 30 of the image-formation optical system there is located wavefront introduction means for introducing in the pupil position 30 of the image-formation optical system a wavefront varying in size with the pupil diameter.

1 - 34 . (canceled) 
   
   
       35 . A microscope observation method, comprising:
 (a) illuminating a sample with illumination light of an NA (numerical aperture) smaller than a maximum NA of a condenser lens or an objective lens;   (b) entering light that transmits through or reflected from the sample into the objective lens, wherein the objective lens is provided with an absorption film having a similar shape as the illumination light, the absorption film provided at a part slightly larger than a part corresponding to the NA of the illumination light on an exit pupil plane or a plane conjugate thereto;   (c) sequentially introducing wavefronts in a state inverting to each other in the vicinity of a part where the wavefronts become flat into the exit pupil plane of the objective lens;   (d) recording each observed image in a state where states of wavefronts invert to each other in the vicinity of a part where the introduced wavefronts become flat; and   (e) carrying out image processing for each recorded image and emphasizing contrast to observe the sample.   
   
   
       36 . The microscope observation method according to  claim 35 , wherein
 the wavefront introduction is carried out by shifting a sight of the objective lens.   
   
   
       37 . The microscope observation method according to  claim 35 , wherein
 the wavefront introduction is carried out by control of a variable shape mirror arranged at a position conjugate with the exit pupil plane of the objective lens.   
   
   
       38 . The microscope observation method according to  claim 35 , wherein
 the illumination light is formed by providing an aperture of a circle or orbicular zone shape smaller than a maximum NA on an entrance pupil plane of the condenser lens, and being transmitted through the aperture.   
   
   
       39 . The microscope observation method according to  claim 35 , wherein
 the illumination light is formed by using a substantial point light source that illuminates a portion smaller than the entrance pupil plane of the condenser lens.