Surface treatment method of titanium material for electrodes

Abstract

Disclosed herein is a surface treatment method of a titanium material for electrodes characterized by including: a titanium oxide layer formation step S 1 of forming a titanium oxide layer with a thickness of 10 nm or more and 80 nm or less on the surface of a titanium material including pure titanium or a titanium alloy; a noble metal layer formation step S 2 of forming a noble metal layer with a thickness of 2 nm or more including at least one noble metal selected from Au, Pt, and Pd on the titanium oxide layer by a PVD method; and a heat treatment step S3 of heat treating the titanium material having the noble metal layer formed thereon at a temperature of 300° C. or more and 800° C. or less.

1 . A surface treatment method of a titanium material for electrodes, comprising:
 a titanium oxide layer formation step of forming a titanium oxide layer with a thickness of 10 nm or more and 80 nm or less on the surface of the titanium material including pure titanium or a titanium alloy;   a noble metal layer formation step of forming a noble metal layer with a thickness of 2 nm or more including at least one noble metal selected from Au, Pt, and Pd on the titanium oxide layer by a PVD method; and   a heat treatment step of heat treating the titanium material having the noble metal layer formed thereon at a temperature of 300° C. or more and 800° C. or less.   
   
   
       2 . The surface treatment method of a titanium material for electrodes according to  claim 1 , wherein the titanium oxide layer formation step includes heat treating the titanium material at a temperature of 200° C. or more and 600° C. or less in an air. 
   
   
       3 . The surface treatment method of a titanium material for electrodes according to  claim 1 , wherein the titanium oxide layer formation step includes subjecting the titanium material to an anodic oxidation treatment at a voltage of 100 V or less. 
   
   
       4 . The surface treatment method of a titanium material for electrodes according to  claim 1 , wherein the titanium oxide layer formation step includes subjecting the titanium material to an oxidation treatment in a passive state forming atmosphere of titanium. 
   
   
       5 . The surface treatment method of a titanium material for electrodes according to  claim 1 , wherein prior to performing the titanium oxide layer formation step, a pickling treatment step of removing the natural oxide layer on the surface of the titanium material by a solution containing a non-oxidizing acid is performed. 
   
   
       6 . The surface treatment method of a titanium material for electrodes according to  claim 2 , wherein prior to performing the titanium oxide layer formation step, a pickling treatment step of removing the natural oxide layer on the surface of the titanium material by a solution containing a non-oxidizing acid is performed. 
   
   
       7 . The surface treatment method of a titanium material for electrodes according to  claim 3 , wherein prior to performing the titanium oxide layer formation step, a pickling treatment step of removing the natural oxide layer on the surface of the titanium material by a solution containing a non-oxidizing acid is performed. 
   
   
       8 . The surface treatment method of a titanium material for electrodes according to  claim 4 , wherein prior to performing the titanium oxide layer formation step, a pickling treatment step of removing the natural oxide layer on the surface of the titanium material by a solution containing a non-oxidizing acid is performed.