Magnetic recording media having five element alloy deposited using pulsed direct current sputtering

Abstract

CoCrPtB is a conventional material used in some of the layers of a thin film magnetic media structure used for recording data in data storage devices such as hard drives. Typically the CoCrPtB layers used for magnetic media have high Cr and low B in bottom magnetic layers and low Cr and high B in top magnetic layers. In accordance with one embodiment of this invention and to improve media electrical performance, fifth elements, such as Ta, Nb and Hf, etc. were added to the CoCrPtB materials, resulting in CoCrPtB-X, to enhance the grain segregation. The five element CoCrPtB-X layers were deposited using a pulsed direct current sputter technique instead of conventional direct current sputtering techniques. The resulting magnetic media structure having CoCrPtB-X alloy layers exhibits an increase in coercivity Hc and improvement in recording performance.

1 - 11 . (canceled) 
     
     
         12 . A method of making magnetic recording medium, comprising:
 providing a substrate for depositing layers;   depositing a first layer comprising Cr over said substrate;   depositing a second layer over said first layer, said second layer made of a material selected from the group consisting of CrW, CrMo, and CrTi;   depositing a third layer over said second layer, said third layer made of a material selected from the group consisting of CoCr, CoCTa, and CoCrRu; and   depositing a fourth layer over said third layer using pulsed direct current sputtering, said fourth layer made of a five element alloy comprising CoCrPtB-X where X is the fifth element; and   depositing a fifth layer comprising of a high magnetic moment saturation alloy.   
     
     
         13 . The method of  claim 12  wherein said step of depositing said fourth layer over said third layer further includes depositing said fourth layer directly on top of said third layer so that said fourth layer is in direct contact with said third layer. 
     
     
         14 . The method of  claim 12  wherein said step of depositing said fifth layer over said fourth layer further includes depositing said fifth layer directly on top of said fourth layer so that said fifth layer is in direct contact with said fourth layer. 
     
     
         15 . The method of  claim 12  wherein said fifth layer comprising of a high magnetic moment saturation alloy is CoCrPtB. 
     
     
         16 . The method of  claim 12  wherein said step of depositing a fourth layer over said third layer using pulsed direct current sputtering further includes using a pulse frequency ranging from 50 KHz to 150 KHz. 
     
     
         17 . The method of  claim 12  wherein said step of depositing a fourth layer over said third layer using pulsed direct current sputtering further includes using a pulse frequency with a reverse time ranging from 0.5 microseconds and 5 microseconds. 
     
     
         18 . The method of  claim 12  wherein said step of depositing a fourth layer over said third layer using pulsed direct current sputtering further includes using a pulse frequency power supply with a duty cycle ranging from 50% to 100%. 
     
     
         19 . The method of  claim 12  wherein the five element alloy comprising CoCrPtB-X where X is the fifth element is selected from the group consisting of CoCrPtBTa, CoCrPtBNb, and CoCrPtBHf. 
     
     
         20 . A method of making magnetic recording medium, comprising:
 providing a substrate for depositing layers;   depositing a first layer comprising Cr over said substrate;   depositing a second layer over said first layer, said second layer made of a material selected from the group consisting of CrW, CrMo, and CrTi;   depositing a third layer over said second layer, said third layer made of a material selected from the group consisting of CoCr, CoCrTa, and CoCrRu; and   depositing a fourth layer over said third layer using pulsed direct current sputtering, said fourth layer made of a five element alloy comprising CoCrPtB-X where X is the fifth element, and said pulsed direct current sputtering having a pulse frequency ranging from 50 KHz to 150 KHz, a reverse time ranging from 0.5 microseconds and 5 microseconds, and a duty cycle ranging from 50% to 100%; and   depositing a fifth layer comprising of a high magnetic moment saturation alloy.   
     
     
         21 . A method of making magnetic recording medium, comprising:
 providing a substrate for depositing layers; depositing a first layer comprising Cr over said substrate;   depositing a second layer over said first layer, said second layer made of a material selected from the group consisting of CrW, CrMo, and CTi;   depositing a third layer over said second layer, said third layer made of a material selected from the group consisting of CoCr, CoCrTa, and CoCrRu; and   depositing a fourth layer over said third layer using pulsed direct current sputtering, said fourth layer made of a five element alloy selected from the group consisting of CoCrPtBTa, CoCrPtBNb, and CoCrPBHf, and said pulsed direct current sputtering having a pulse frequency ranging from 50 KHz to 150 KHz, a reverse time ranging from 0.5 microseconds and 5 microseconds, and a duty cycle ranging from 50% to 100%; and   depositing a fifth layer comprising of a high magnetic moment saturation alloy directly on said fourth layer.