US2009214782A1PendingUtilityA1

Organic vapor jet printing system

66
Individually held — no corporate assignee on recordPriority: Feb 21, 2008Filed: Feb 21, 2008Published: Aug 27, 2009
Est. expiryFeb 21, 2028(~1.6 yrs left)· nominal 20-yr term from priority
Inventors:Stephen R. Forrest
C23C 14/228C23C 14/04C23C 14/12C23C 16/463H10K 71/135H10K 71/13
66
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Claims

Abstract

An organic vapor jet printing system includes a pump for increasing the pressure of an organic flux.

Claims

exact text as granted — not AI-modified
1 . An organic vapor jet printing system, comprising:
 a heated chamber configured to produce an organic flux, the flux including a carrier gas and a vapor of an organic material;   a source cell configured to introduce the vapor and the carrier gas into the heated chamber;   a nozzle body configured to direct the flux to a substrate;   a transport line disposed between the heated chamber and the nozzle body, the transport line configured to convey the flux from the heated chamber to the nozzle body; and   a pump connected to the line, the pump configured to pump the flux from the chamber to the transport line and to the nozzle body.   
     
     
         2 . The system of  claim 1 , further comprising a stage configured to translate a substrate with respect to the nozzle body. 
     
     
         3 . The system of  claim 2 , wherein the stage is configured to cool the substrate to a temperature sufficient to cause deposition of the organic material onto a surface of the substrate to form an organic film on the substrate. 
     
     
         4 . The system of  claim 1 , further comprising a heating element configured to regulate a temperature within the heated chamber. 
     
     
         5 . The system of  claim 1 , wherein the nozzle body includes an array of nozzles. 
     
     
         6 . The system of  claim 1 , wherein the pump is configured to cause pressure pulses in the flux. 
     
     
         7 . The system of  claim 1 , wherein the pump includes a piston. 
     
     
         8 . The system of  claim 7 , wherein the pump includes a crank configured to actuate the piston. 
     
     
         9 . The system of  claim 7 , wherein the pump includes a solenoid configured to actuate the piston. 
     
     
         10 . The system of  claim 1 , wherein the pump includes a piezoelectric material. 
     
     
         11 . The system of  claim 1 , wherein the pump is a microelectromechanical system. 
     
     
         12 . The system of  claim 1 , wherein the pump is disposed in a position proximate to the nozzle body. 
     
     
         13 . The system of  claim 1 , further comprising a thermal bath configured to regulate the temperature of the pump. 
     
     
         14 . The system of  claim 1 , further comprising at least one additional source cell configured to introduce a vapor of at least one additional organic material into the heated chamber. 
     
     
         15 . A method of depositing an organic film onto a substrate, comprising:
 heating an organic material to form an organic vapor;   transporting the organic vapor in a carrier gas from a source cell into a heated chamber;   heating the heated chamber sufficiently to form a substantially uniform organic flux of the carrier gas and organic vapor by diffusive mixing of the gas and vapor within the heated chamber;   transporting the organic flux to a nozzle body;   directing the organic flux to a cooled substrate;   increasing the pressure of the organic flux with a pump before the organic flux exits the nozzle body; and   depositing the organic material onto a surface of the cooled substrate to form an organic film on the substrate.   
     
     
         16 . The method of  claim 15 , wherein the pressure is increased by applying pressure pulses to the organic flux. 
     
     
         17 . The method of  claim 15 , wherein the pump is a piston pump. 
     
     
         18 . The method of  claim 17 , wherein the pump is actuated with a crank. 
     
     
         19 . The method of  claim 17 , wherein the pump is actuated with a solenoid. 
     
     
         20 . The method of  claim 15 , wherein the pump is actuated with a piezoelectric material. 
     
     
         21 . The method of  claim 15 , wherein the pump is a microelectromechanical system. 
     
     
         22 . The method of  claim 15 , wherein the pump is disposed at a position proximate to the nozzle body. 
     
     
         23 . The method of  claim 15 , wherein the nozzle body comprises an array of nozzles. 
     
     
         24 . The method of  claim 15 , further comprising translating the cooled substrate with respect to the nozzle body. 
     
     
         25 . The method of  claim 15 , further comprising regulating the temperature of the pump with a thermal bath. 
     
     
         26 . The method of  claim 15 , further comprising depositing a plurality of organic materials from a plurality of source cells

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