Apparatus and methods for supplying fuel employed by abatement systems to effectively abate effluents

Abstract

An abatement apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, including: a manifold; a fuel source adapted to supply fuel to the manifold through a fuel conduit; and a plurality of nozzles adapted to receive fuel from the manifold; wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.

1 . An apparatus for introducing fuel into an electronic device manufacturing effluent abatement tool, comprising:
 a manifold;   a fuel source adapted to supply fuel to the manifold through a fuel conduit; and   a plurality of nozzles adapted to receive fuel from the manifold;   wherein the manifold is adapted to supply fuel to the nozzles at a fuel velocity greater than a flame velocity.   
     
     
         2 . The apparatus of  claim 1 , further comprising a single flashback arrestor situated between the manifold and the fuel source and adapted to prevent a flame from travelling to the fuel source from the manifold. 
     
     
         3 . The apparatus of  claim 1 , wherein the manifold is further adapted to reduce a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 20% of the highest fuel velocity. 
     
     
         4 . The apparatus of  claim 1 , wherein the manifold is further adapted to reduce a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 15% of the highest fuel velocity. 
     
     
         5 . The apparatus of  claim 1 , wherein the manifold is further adapted to reduce a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 10% of the highest fuel velocity. 
     
     
         6 . The apparatus of  claim 1 , wherein the fuel velocity is at least twice the flame velocity. 
     
     
         7 . The apparatus of  claim 1 , wherein the fuel velocity is at least three times the flame velocity. 
     
     
         8 . The apparatus of  claim 1 , wherein the fuel velocity is at least five times the flame velocity. 
     
     
         9 . The apparatus of  claim 1 , wherein the manifold is further adapted to receive fuel through a single fuel inlet. 
     
     
         10 . The apparatus of  claim 1 , wherein the manifold further comprises fuel lines having properties selected to reduce variation in fuel velocity and pressure at the nozzles. 
     
     
         11 . A method for operating an electronic device manufacturing abatement system, comprising:
 flowing fuel from a fuel supply into a manifold through a fuel conduit; and   flowing the fuel from the manifold through a plurality of nozzles;   wherein the manifold is adapted to flow fuel to the nozzles at a fuel velocity greater than a flame velocity.   
     
     
         12 . The method of  claim 11 , further comprising flowing fuel through a flashback arrestor situated between the manifold and the fuel source and adapted to prevent a flame from travelling to the fuel source from the manifold. 
     
     
         13 . The method of  claim 11 , further comprising reducing a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 20% of the highest fuel velocity. 
     
     
         14 . The method of  claim 11 , further comprising reducing a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 15% of the highest fuel velocity. 
     
     
         15 . The method of  claim 11 , further comprising reducing a variation in fuel velocity between a nozzle having a lowest fuel velocity and a nozzle having a highest fuel velocity to less than about 10% of the highest fuel velocity. 
     
     
         16 . The method of  claim 11 , further comprising flowing the fuel through the fuel nozzles at a velocity at least twice the flame velocity. 
     
     
         17 . The method of  claim 11 , further comprising flowing the fuel through the fuel nozzles at a velocity at least three times the flame velocity. 
     
     
         18 . The method of  claim 11 , further comprising flowing the fuel through the fuel nozzles at a velocity at least five times the flame velocity. 
     
     
         19 . The method of  claim 11 , wherein the step of flowing fuel from the fuel supply into the manifold through the fuel conduit further comprises flowing the fuel from the fuel supply into the manifold through a single manifold fuel inlet.