Transfer of optical element patterns on a same side of a substrate already having a feature thereon

Abstract

A passive optical element is transferred into a substrate already having features with a vertical dimension thereon. The features may be another passive optical element, an active optical element, a dichroic layer, a dielectric layer, alignment features, metal portions. A protective layer is provided over the feature during the transfer of the optical element. One or more of these processes may be performed on a wafer level.

1 . An optical element comprising:
 a refractive optical element in a first region of a first surface of a substrate;   a diffractive optical element in a second region of the first surface of the substrate, the second region being separate from the first region the refractive and the diffractive optical elements having been transferred into the first surface of the substrate, the first region being lower than the second region.   
     
     
         2 .- 35 . (canceled) 
     
     
         36 . The optical element as claimed in  claim 1 , further comprising a transparent protective portion on the diffractive optical element. 
     
     
         37 . The optical element as claimed in  claim 36 , wherein the protective portion is convex. 
     
     
         38 . The optical element as claimed in  claim 36 , wherein the protective portion has a substantially planar upper surface. 
     
     
         39 . The optical element as claimed in  claim 36 , wherein the protective portion is a photoresist. 
     
     
         40 . The optical element as claimed in  claim 1 , further comprising a feature on the first surface. 
     
     
         41 . The optical element as claimed in  claim 40 , wherein a vertex of the refractive element is substantially equal in height to the feature. 
     
     
         42 . The optical element as claimed in  claim 40 , further comprising a transparent protective portion on at least one of the diffractive optical element and the feature. 
     
     
         43 . The optical element as claimed in  claim 40 , wherein the feature is in the second region. 
     
     
         44 . The optical element as claimed in  claim 1 , further comprising metal portions on the first surface over at least one of the refractive and diffractive optical elements. 
     
     
         45 . The optical element as claimed in  claim 1 , further comprising one of dichroic portions and dielectric portions on the first surface over at least one of the refractive and diffractive optical elements. 
     
     
         46 . The optical element as claimed in  claim 1 , wherein a vertex of the refractive element is substantially equal in height to the second region.