Perforated support plate

Abstract

To provide a perforated support plate with high rigidity, the perforated support plate for supporting a surface of a wafer by interposing an adhesive layer comprises a reinforcing part for deflection prevention.

1 . A perforated support plate for supporting a surface of a wafer by interposing an adhesive layer, comprising
 a reinforcing part for deflection prevention.   
   
   
       2 . The perforated support plate according to  claim 1 , wherein
 the reinforcing part for deflection prevention is a no-hole area for deflection prevention that is formed on a plate base material and configured with a line of a geometric pattern.   
   
   
       3 . The perforated support plate according to  claim 2 , wherein
 the geometric pattern is configured with a plurality of concentric circles, lines extending radially, or a repetition of a same graphic.   
   
   
       4 . The perforated support plate according to  claim 2 , wherein
 a line width of the geometric pattern is 1 mm or less.   
   
   
       5 . The perforated support plate according to  claim 1 , comprising
 an unopened area for suction.   
   
   
       6 . The perforated support plate according to  claim 1 , which is approximately 300 mm in diameter and 0.7 mm or less in thickness. 
   
   
       7 . The perforated support plate according to  claim 3 , wherein
 a line width of the geometric pattern is 1 mm or less.