Scanning electron microscope and similar apparatus

Abstract

To provide a scanning electron microscope that can detect with high efficiency the secondary electrons generated from the entire surface of a target, in a scanning electron microscope with an objective lens having a retarding electric field near a sample, at least two detectors are arranged with axial symmetry to electron optical axis, a target that causes secondary electrons or reflected electrons to collide with the target is disposed near the detectors, and at least one electrode member having a negative potential lower than a potential of the target is formed almost with axial symmetry to the electron optical axis.

1 . A scanning electron microscope and similar apparatus, comprising:
 an objective lens disposed near a sample, and formed with a retarding electric field;   at least two detectors disposed with substantially axial symmetry with respect to an electron optical axis;   a target disposed near said detectors in order to cause secondary electrons or reflected electrons to collide with said target; and   an electrode member disposed downstream with respect to said target, said electrode member being disposed between said objective lens and said detectors and being impressed with a negative potential lower than a surface potential of said target and formed with substantially axial symmetry with respect to the electron optical axis.   
     
     
         2 . The scanning electron microscope and similar apparatus according to  claim 1 , wherein the surface potential of said target is also maintained at a negative value. 
     
     
         3 . The scanning electron microscope and similar apparatus according to  claim 1 , wherein said detectors each have a cap of a 5 to 20 mm diameter to acquire secondary electrons or reflected electrons. 
     
     
         4 . The scanning electron microscope and similar apparatus according to  claim 3 , further comprising an additional detector above said detectors arranged with axial symmetry. 
     
     
         5 . The scanning electron microscope and similar apparatus according to  claim 4 , further comprising a static electromagnetic field objective lens structure that maintains the sample at a negative potential and includes said objective lens functioning as the retarding electric field. 
     
     
         6 . The scanning electron microscope and similar apparatus according to  claim 1 , further comprising an electrode disposed near the sample to accelerate secondary electrons, the sample being set to have a grounding potential. 
     
     
         7 . The scanning electron microscope and similar apparatus according to  claim 2 , wherein said detectors each have a cap of a 5 to 20 mm diameter to acquire secondary electrons or reflected electrons. 
     
     
         8 . The scanning electron microscope and similar apparatus according to  claim 7 , further comprising an additional detector above said detectors arranged with axial symmetry. 
     
     
         9 . The scanning electron microscope and similar apparatus according to  claim 8 , further comprising a static electromagnetic field objective lens structure that maintains the sample at a negative potential and includes said objective lens functioning as the retarding electric field. 
     
     
         10 . The scanning electron microscope and similar apparatus according to  claim 7 , further comprising an electrode disposed near the sample to accelerate secondary electrons, the sample being set to have a grounding potential. 
     
     
         11 . The scanning electron microscope and similar apparatus according to  claim 1 , further comprising an additional detector above said detectors arranged with axial symmetry. 
     
     
         12 . The scanning electron microscope and similar apparatus according to  claim 11 , further comprising a static electromagnetic field objective lens structure that maintains the sample at a negative potential and includes said objective lens functioning as the retarding electric field. 
     
     
         13 . The scanning electron microscope and similar apparatus according to  claim 11 , further comprising an electrode disposed near the sample to accelerate secondary electrons, the sample being set to have a grounding potential. 
     
     
         14 . The scanning electron microscope and similar apparatus according to  claims 1 , further comprising a static electromagnetic field objective lens structure that maintains the sample at a negative potential and includes said objective lens functioning as the retarding electric field.