Resonator system with a plurality of individual mechanically coupled resonators and method of making same

Abstract

A method of fabricating a MEMS piezoelectric resonator system includes forming a stack of layers on a substrate, the stack comprising at least one piezoelectric material layer spaced from the substrate by a sacrificial layer, patterning the stack to form a plurality of edge coupled resonators, and removing at least a portion of the sacrificial layer to suspend the resonators relative to the substrate.

1 . A method of fabricating a MEMS piezoelectric resonator system, the method comprising:
 forming a stack of layers on a substrate, the stack comprising at least one piezoelectric material layer spaced from the substrate by a sacrificial layer;   patterning the stack to form a plurality of edge coupled resonators; and   removing at least a portion of the sacrificial layer to suspend the resonators relative to the substrate.   
   
   
       2 . The method of  claim 1  in which patterning includes the use of a mask and an etchant. 
   
   
       3 . The method of  claim 1  in which removing includes etching. 
   
   
       4 . The method of  claim 1  in which the stack includes electrode layers. 
   
   
       5 . The method of  claim 4  in which the electrode layers are on opposite sides of the piezoelectric material layer.