Method of producing components for controlling a fluid flow and components produced by this method

Abstract

A method for producing a micromechanical component for controlling a fluid flow and a component produced according to this method are described. The method for producing a micromechanical component for controlling a fluid flow includes: producing an oscillatory diaphragm on a surface of a substrate by forming an underlying cavity from the same side of the surface, covering the substrate with an intermediate layer, patterning the intermediate layer, and covering the intermediate layer with a covering layer sealing the micromechanical component. It is characterized by the fact that the intermediate layer is patterned in such a way that a sealing element of a fluid valve forms on the diaphragm, which element seals and/or surrounds a valve opening formed in the covering layer.

1 - 25 . (canceled) 
   
   
       26 . A method for producing a micromechanical component for controlling a fluid flow, the method comprising:
 producing an oscillatory diaphragm on a surface of a substrate by forming an underlying cavity from a same side of the surface;   covering the substrate with an intermediate layer;   patterning the intermediate layer; and   covering the intermediate layer with a covering layer sealing the micromechanical component;   wherein the intermediate layer is patterned in such a way that a sealing element of a fluid valve is formed on the diaphragm, thereby at least one of sealing and surrounding a valve opening formed in the covering layer.   
   
   
       27 . The method according to  claim 26 , wherein the intermediate layer is patterned such that a hollow space develops around the sealing element. 
   
   
       28 . The method according to  claim 26 , wherein when the intermediate layer is patterned, a fluid-conducting through-hole through the diaphragm to the underlying cavity is produced. 
   
   
       29 . The method according to  claim 28 , wherein a first through-hole in a first diaphragm is patterned such that it connects a first cavity lying under the first diaphragm to a first hollow space surrounding a first sealing element. 
   
   
       30 . The method according to  claim 28 , wherein a second through-hole in a second diaphragm is patterned such that it connects a second cavity lying under the second diaphragm to a second valve opening. 
   
   
       31 . The method according to  claim 26 , further comprising:
 one of depositing an anti-stick layer and implementing an anti-stick functionality in a sealing region between the covering layer and the sealing element of the fluid valve.   
   
   
       32 . The method according to  claim 31 , wherein the anti-stick layer is deposited on at least one of glass and silicon. 
   
   
       33 . The method according to  claim 31 , wherein the anti-stick functionality is implemented on at least one of glass and silicon. 
   
   
       34 . The method according to  claim 31 , wherein the anti-stick layer is made up of silicon. 
   
   
       35 . The method according to  claim 31 , wherein the anti-stick layer is a silicon nitride. 
   
   
       36 . The method according to  claim 26 , further comprising:
 during the production of a first oscillatory diaphragm, producing at least one additional oscillatory diaphragm on the surface of the substrate by forming a second underlying cavity.   
   
   
       37 . The method according to  claim 36 , wherein when at least one of the intermediate layer and the substrate is patterned, a fluid-conducting connection is produced between a first hollow space formed around a first sealing element and an additional hollow space formed around an additional sealing element. 
   
   
       38 . The method according to  claim 37 , further comprising:
 forming a third oscillatory diaphragm adjacent to at least one of the fluid-conducting connection and one of the two hollow spaces.   
   
   
       39 . The method according to  claim 38 , wherein a separate fluid connection is formed for a cavity sealed by the third oscillatory diaphragm. 
   
   
       40 . The method according to  claim 38 , further comprising:
 positioning an element on the third oscillatory diaphragm, which element exercises at least one of a push and a pull effect on the diaphragm when activated.   
   
   
       41 . The method according to  claim 31 , wherein the valve, the diaphragm, the sealing element, the anti-stick layer, and the covering layer are patterned such that in an assembled state of the micromechanical component, the sealing element seals the valve opening under prestressing. 
   
   
       42 . A micromechanical component for controlling a fluid flow, comprising:
 a substrate;   a patterned intermediate layer;   a covering layer sealing the micromechanical component;   an oscillatory diaphragm and an underlying cavity formed on a surface of the substrate facing the intermediate layer through processing from a same side, and forming a valve together with a sealing element and a valve opening; and   means for valve tensioning for at least one of an intake valve and a discharge valve disposed behind, viewed from outside, a valve sealing seat in an interior of the micromechanical component.   
   
   
       43 . The micromechanical component according to  claim 42 , wherein the means for valve tensioning for at least one of the intake valve and the discharge valve includes at least parts of the diaphragm. 
   
   
       44 . The micromechanical component according to  claim 42 , wherein the means for valve tensioning for at least one of the intake valve and the discharge valve includes at least one of the sealing element and one of an anti-stick layer and anti-stick functionality. 
   
   
       45 . The micromechanical component according to  claim 44 , wherein the anti-stick layer is deposited on at least one of glass and silicon. 
   
   
       46 . The micromechanical component according to  claim 44 , wherein the anti-stick functionality is deposited on at least one of glass and silicon. 
   
   
       47 . The micromechanical component according to  claim 44 , wherein the anti-stick layer is made up of silicon. 
   
   
       48 . The micromechanical component according to  claim 44 , wherein the anti-stick layer is a silicon nitride. 
   
   
       49 . The micromechanical component according to  claim 42 , wherein a fluid-conducting connection is provided between the cavity of the discharge valve and the outside of the micromechanical component. 
   
   
       50 . The micromechanical component according to  claim 42 , wherein the valve opening of at least one of the intake valve and the discharge valve is formed in the covering layer.