Method for manufacturing metal-based ceramic composite target containing noble metal

Abstract

A method for manufacturing a metal-based ceramic composite target containing noble metal is provided, which includes firstly applying a ceramic powder uniformly onto a surface of a magnetic metal powder by using a wet powder mixing process, and drying it to obtain a ceramic-metal composite powder, and then uniformly mixing a noble metal powder with the ceramic-metal powder by using a dry powder mixing process, and finally making the ceramic-metal composite powder into a compact target by using a molding and compacting process. The manufacturing method of the present invention can uniformly mix the powders of the magnetic metal, the ceramic, and the noble metal, and reduce the loss of the noble metal powder in the production process of the target, so as to improve the quality of the target and decrease the production cost thereof.

1 . A method for manufacturing a metal-based ceramic composite target containing noble metal, comprising the steps of:
 (a) providing a magnetic metal powder and a ceramic powder with purities higher than 99.9%;   (b) wet powder mixing the ceramic powder and the magnetic metal powder in a solvent, to form a slurry, wherein the ceramic powder is applied onto the surface of the magnetic metal powder;   (c) drying the slurry, to form a ceramic-metal composite powder;   (d) dry powder mixing the ceramic-metal composite powder with a noble metal powder with a purity higher than 99.9%; and   (e) molding and compacting the mixed ceramic-metal composite powder and noble metal powder, to form the metal-based ceramic composite target containing noble metal.   
     
     
         2 . The method as claimed in  claim 1 , wherein in steps (a) and (d), the purities of the magnetic metal powder, the ceramic powder, and the noble metal powder are higher than 99.95%. 
     
     
         3 . The method as claimed in  claim 1 , wherein in step (a), the percent by weight (wt %) of the ceramic powder is 5% to 12%, the wt % of the noble metal powder is 20% to 50%, and the rest of the wt % is the content of the magnetic metal powder. 
     
     
         4 . The method as claimed in  claim 3 , wherein in step (a), the magnetic metal powder is cobalt, or an alloy thereof. 
     
     
         5 . The method as claimed in  claim 4 , wherein in step (a), the cobalt alloy is cobalt-chromium alloy. 
     
     
         6 . The method as claimed in  claim 5 , wherein in step (a), the wt % of chromium in the cobalt-chromium alloy is 4% to 16%. 
     
     
         7 . The method as claimed in  claim 1 , wherein in step (a), the ceramic powder is SiO 2  or TiO 2 . 
     
     
         8 . The method as claimed in  claim 1 , wherein in step (a), the particle size of the ceramic powder is 0.07 to 1.0 μm. 
     
     
         9 . The method as claimed in  claim 1 , wherein in step (a), the noble metal powder is Pt. 
     
     
         10 . The method as claimed in  claim 1 , wherein in step (b), water or alcohol is used as the solvent. 
     
     
         11 . The method as claimed in  claim 1 , wherein in step (b), the surface of the magnetic metal powder and the surface of the ceramic powder are differently charged, enabling the ceramic powder to be applied onto the surface of the magnetic metal powder. 
     
     
         12 . The method as claimed in  claim 1 , wherein step (b) further comprises a step of pH adjustment, wherein an acid or base solution is added to adjust the pH of the slurry. 
     
     
         13 . The method as claimed in  claim 1 , wherein in step (b), the time for the wet powder mixing is 6 to 24 hours. 
     
     
         14 . The method as claimed in  claim 1 , wherein in step (c), the slurry is dried through a vacuum drying method. 
     
     
         15 . The method as claimed in  claim 14 , wherein in step (c), the temperature for the vacuum drying is 80° C. to 160° C., and the time for the vacuum drying is 2 to 6 hours. 
     
     
         16 . The method as claimed in  claim 15 , wherein in step (c), the vacuum level for the vacuum drying is less than 760 torr. 
     
     
         17 . The method as claimed in  claim 1 , wherein in step (d), the time for the dry powder mixing is 4 to 8 hours. 
     
     
         18 . The method as claimed in  claim 1 , wherein in step (e), the molding and compacting step is carried out by a hot pressing or hot isostatic pressing process. 
     
     
         19 . The method as claimed in  claim 18 , wherein in step (e), the temperature for the molding and compacting is 800° C. to 1200° C., and the time for the molding and compacting is 1 to 4 hours. 
     
     
         20 . The method as claimed in  claim 1 , wherein the method for manufacturing the metal-based ceramic composite target comprising noble metal is used in the film sputtering process, in the magnetic recording, photoelectricity, and semi-conductor industries.