Carburizing apparatus and carburizing method

Abstract

A carburizing apparatus that performs a vacuum carburizing treatment with respect to an object includes: a carburizing furnace that contains the object; a gas supply apparatus that supplies a carburizing gas to the carburizing furnace; a light emitting device that emits light by using an in-furnace gas inside of the carburizing furnace which is supplied with the carburizing gas; a light receiving device that receives light emitted from the light emitting device; and a processing device that calculates the composition of the in-furnace gas based on the light receiving result of the light receiving device.

1 . A carburizing apparatus that performs a vacuum carburizing treatment with respect to an object comprising:
 a carburizing furnace that contains the object;   a gas supply apparatus that supplies a carburizing gas to the carburizing furnace;   a light emitting device that emits light by using an in-furnace gas inside of the carburizing furnace which is supplied with the carburizing gas;   a light receiving device that receives light emitted from the light emitting device; and   a processing device that calculates the composition of the in-furnace gas based on the light receiving result of the light receiving device.   
   
   
       2 . The carburizing apparatus according to  claim 1 , wherein
 the light emitting device emits light by using the in-furnace gas which is introduced to a detection space connected to an internal space of the carburizing furnace.   
   
   
       3 . The carburizing apparatus according to  claim 1 , wherein
 the light emitting device emits light by imparting energy to the in-furnace gas.   
   
   
       4 . The carburizing apparatus according to  claim 3 , wherein
 the light emitting device generates plasma in a space which includes the in-furnace gas.   
   
   
       5 . The carburizing apparatus according to  claim 3 , wherein
 the light emitting device emits a laser light into the in-furnace gas.   
   
   
       6 . The carburizing apparatus according to  claim 1 , wherein
 the light receiving device detects the light intensity emitted from the light emitting device.   
   
   
       7 . The carburizing apparatus according to  claim 1 , further comprising:
 a control device that controls at least one of an amount of the carburizing gas supplied per unit time by the gas supply apparatus or a carburizing time based on the composition of the in-furnace gas calculated by the processing device.   
   
   
       8 . A carburizing method that performs a vacuum carburizing treatment with respect to an object comprising:
 supplying a carburizing gas to a carburizing furnace that contains the object;   causing an in-furnace gas existing inside of the carburizing furnace which is supplied with the carburizing gas to emit light;   receiving the light which is emitted; and   calculating a composition of the in-furnace gas based on the light receiving result.   
   
   
       9 . The carburizing method according to  claim 8 , wherein the receiving the light further comprising detecting intensity of the light received; and the carburizing method further comprising:
 calculating the relationship in advance between the composition of the in-furnace gas and the intensity of the light which caused the in-furnace gas to emit light; and   calculating the composition of the in-furnace gas based on the relationship and the light intensity which is detected.