Probe card cassette and probe card

Abstract

A holding section ( 2 ) holds a probe card ( 1 ). Transport mechanisms ( 3 a to 3 d ) have the function of transporting the probe card ( 1 ) from the holding section ( 2 ). A lock mechanism ( 4 ) is provided for the transport mechanism ( 3 d ). When the probe card cassette is placed in prober equipment, the lock mechanism ( 4 ) is released to allow the probe card ( 1 ) to be transported from the holding section ( 2 ) by the transport mechanisms ( 3 a to 3 d ). When the probe card cassette is not placed in the prober equipment, the lock mechanism ( 4 ) operates to fix the probe card ( 1 ) in the holding section ( 2 ).

1 . A probe card cassette comprising:
 a holding section for holding a probe card;   a transport mechanism for transporting the probe card from the holding section; and   a lock mechanism for locking operation of the transport mechanism,   wherein when the probe card cassette is placed in prober equipment, the lock mechanism is released to allow the probe card to be transported from the holding section by the transport mechanism, while when the probe card cassette is not placed in the prober equipment, the lock mechanism operates to fix the probe card in the holding section.   
     
     
         2 . A probe card comprising:
 a probe card substrate;   a probe needle whose base end is connected to one surface of the probe card substrate; and   a stopper section provided in the probe card substrate and including a stopper member and a height adjustment mechanism, the stopper member protruding from the one surface and being slidable in a direction in which the stopper member protrudes, the height adjustment mechanism adjusting height of the stopper member protruding from the one surface,   wherein the height adjustment mechanism is configured to be able to adjust the protruding height of the stopper member between a first height higher than the position of tip end of the probe needle and a second height lower than the position of the tip end of the probe needle.   
     
     
         3 . The probe card of  claim 2 , wherein the height adjustment mechanism includes an inlet/outlet for introducing a medium from outside the stopper section and discharging the medium to outside the stopper section; and
 the height adjustment mechanism is configured so as to set the protruding height of the stopper member in accordance with the amount of the medium introduced.   
     
     
         4 . The probe card of  claim 2 , wherein the height adjustment mechanism includes a rotating mechanism which is controllable from outside the stopper section; and
 the height adjustment mechanism is configured so as to set the protruding height of the stopper member in accordance with operation of the rotating mechanism.   
     
     
         5 . The probe card of  claim 2 , wherein the height adjustment mechanism is configured to be able to output a signal indicating a result of height adjustment; and
 the probe card substrate includes:
 a memory device for storing a -result of past height adjustment or a result of height adjustment performed during fabrication; and 
 a comparator for comparing the signal output from the height adjustment mechanism with the past height adjustment result or the result of the height adjustment performed during fabrication stored in the memory device, and if a difference therebetween exceeds a reference value, outputting a signal indicating that. 
   
     
     
         6 . A probe card cassette comprising a holding section for holding the probe card of  claim 2 ,
 wherein the height adjustment mechanism in the probe card is configured to be able to output a signal indicating a result of height adjustment; and   the holding section includes:
 a memory device for storing a result of past height adjustment or a result of height adjustment performed during fabrication; and 
 a comparator for comparing the signal output from the height adjustment mechanism with the past height adjustment result or the result of the height adjustment performed during fabrication stored in the memory device, and if a difference therebetween exceeds a reference value, outputting a signal indicating that. 
   
     
     
         7 . A probe card comprising:
 a probe card substrate having a hole, with a first electrode provided on one surface of the probe card substrate; and   a probe needle section including a base plate and a projection protruding from the base plate, with the base end of a probe needle connected to tip end of the projection,   wherein the probe card substrate and the probe needle section are connected via an elastic member, with the projection of the probe needle section inserted into the hole in the probe card substrate from the one surface side, in such a manner that the probe needle section is slidable in a direction in which the projection is inserted;   on a surface with the projection protruding of the base plate of the probe needle section, a second electrode is provided to face the first electrode;   when pressure is applied to the probe needle section from backside of the base plate, the elastic member contracts to cause the surface with the projection protruding of the base plate and the one surface of the probe card substrate to come into contact with each other to give an electrical connection between the first electrode and the second electrode; and   when no pressure is applied to the probe needle section from backside of the base plate, the elastic member extends, such that the surface with the projection protruding of the base plate and the one surface of the probe card substrate are separated from each other and tip end of the probe needle is positioned inwardly of another surface of the probe card substrate.