Deposition apparatus for organic electroluminescent display device

Abstract

An embodiment of this document provides a deposition apparatus for an organic electroluminescent display device, comprising a vacuum chamber, a deposition source placed on a bottom within the vacuum chamber, a mask configured to mask a source generated by the deposition source, a target substrate on which the source passing through the mask is deposited, a first plate placed on an upper side within the vacuum chamber, wherein magnets are arranged with them being spaced apart from each other on one side of the first plate, and a second plate placed below the first plate, wherein grooves into which the respective magnets are inserted are formed in the second plate.

1 . A deposition apparatus for an organic electroluminescent display device, comprising:
 a vacuum chamber;   a deposition source placed on a bottom within the vacuum chamber;   a mask configured to mask a source generated by the deposition source;   a target substrate on which the source passing through the mask is deposited;   a first plate placed on an upper side within the vacuum chamber, wherein magnets are arranged with them being spaced apart from each other on one side of the first plate; and   a second plate placed below the first plate, wherein grooves into which the respective magnets are inserted are formed in the second plate.   
   
   
       2 . The deposition apparatus of  claim 1 , wherein when a length of the magnet is ‘a’, the magnets are arranged at a distance of ‘a’ to ‘ 2 a’. 
   
   
       3 . The deposition apparatus of  claim 2 , wherein the length of the magnet ‘a’ is 10 mm. 
   
   
       4 . The deposition apparatus of  claim 1 , wherein the magnets having opposite polarities are alternately arranged. 
   
   
       5 . The deposition apparatus of  claim 1 , wherein a shape of each of the magnets is a cylinder. 
   
   
       6 . The deposition apparatus of  claim 1 , wherein a shape of each of the magnets is a tetrahedron. 
   
   
       7 . The deposition apparatus of  claim 1 , wherein a shape of each of the magnets is a polyhedron. 
   
   
       8 . The deposition apparatus of  claim 1 , wherein a shape of each of the grooves is identical to that of each of the magnets. 
   
   
       9 . The deposition apparatus of  claim 1 , wherein the target substrate comprises a magnetic substrate. 
   
   
       10 . The deposition apparatus of  claim 1 , wherein in the case where the target substrate is made of SUS 430, a thickness of the second plate is 15 mm, a depth of the groove is 12 mm, and a length of the groove is 11 mm.