Piezoelectric element, droplet-ejecting head, droplet-ejecting apparatus, and method of producing a piezoelectric element

Abstract

The present invention provides a piezoelectric element including a piezoelectric body and top and bottom electrodes holding the piezoelectric body therebetween, wherein an interlayer dielectric is interposed between the piezoelectric body and the top electrode in an area other than the active area of the piezoelectric body, and the top electrode is layered directly on the piezoelectric body in the active area of the piezoelectric body.

1 . A method of producing a piezoelectric element, comprising:
 forming an electro-conductive crystalline layer, forming a deposition layer on the crystalline layer by a vapor- or liquid-phase growth method, and patterning the crystalline layer and the deposition layer, to thereby sequentially form a bottom electrode made of the crystalline layer and a piezoelectric body made of the deposition layer;   forming an interlayer dielectric layer on the bottom electrode and the piezoelectric body followed by patterning an opening in the interlayer dielectric layer at a position in the active area of the piezoelectric body; and   forming an electro-conductive layer on the interlayer dielectric layer as well as on the piezoelectric body exposed at the opening of the interlayer dielectric layer followed by patterning the electro-conductive layer to form an top electrode made of the electro-conductive layer.   
     
     
         2 . A method of producing a piezoelectric element, comprising:
 forming an electro-conductive crystalline layer, forming a deposition layer on the crystalline layer by a vapor- or liquid-phase growth method, and patterning the crystalline layer and the deposition layer, to thereby sequentially form a bottom electrode made of the crystalline layer and a piezoelectric body made of the deposition layer;   forming an interlayer dielectric layer on the bottom electrode and the piezoelectric body followed by patterning an opening in the interlayer dielectric layer at a position in the active area of the piezoelectric body as well as an opening in the interlayer dielectric layer at a position in an electrical connection area where an top electrode is to be connected to a wiring; and   forming an electro-conductive layer on the interlayer dielectric layer as well as on the piezoelectric body exposed at the openings of the interlayer dielectric layer followed by patterning the electro-conductive layer to form the top electrode made of the electro-conductive layer.