Polishing tool and polishing device

Abstract

A grinding machine ( 10 ) composed of a support table ( 12 ) for supporting an object ( 11 ) to be ground, a rotating shaft ( 13 a ) vertically arranged above the support table, and a grinding tool ( 40 ) connected to a lower end of the rotating shaft in parallel with the support table, in which the grinding tool is composed of a grind stone-holding member ( 32 ) on which a circular ultrasonic vibrators ( 31 a, 31 b ) electrically connectable to an electric source are fixed and a circular grind stone ( 33 ) attached to a lower end of a periphery of the grind stone-holding member, in which the grind stone-holding member of the grinding tool has a continuous or discontinuous circular air space area ( 36 ) composed of multiple circular air space regions which are composed of circularly formed or arranged discontinuous air spaces between a position of the circular ultrasonic vibrator and a position at which the grind stone-holding member is connected to the rotating shaft, whereby the multiple circular air space area keeps an ultrasonic wave generated from the circular ultrasonic vibrator from linearly propagating to an area on an opposite side where the rotating shaft is connected, can grind an object to be ground with high precision because the ultrasonic wave generated in the ultrasonic vibrator is efficiently applied to the grind stone.

1 . A grinding machine comprising a support table on which an object to be ground is supported, a rotating shaft vertically arranged above the support table, and a grinding tool connected to a lower end of the rotating shaft in parallel with the support table, the grinding tool comprising a grind stone-holding member on which a circular ultrasonic vibrator electrically connectable to an electric source is fixed and a circular grind stone attached to a lower end of a periphery of the grind stone-holding member, in which the grind stone-holding member of the grinding tool has a continuous or discontinuous circular air space area between a position of the circular ultrasonic vibrator and a position at which the grind stone-holding member is connected to the rotating shaft, the continuous or discontinuous circular air space area comprising multiple circular air space regions which comprise circularly formed or arranged continuous or discontinuous air spaces, whereby the circular air space area keeps an ultrasonic wave generated from the circular ultrasonic vibrator from linearly propagating to an area on an opposite side where the rotating shaft is connected. 
   
   
       2 . The grinding machine of  claim 1 , in which the circular air space area comprises plural inner penetrating grooves intermittently formed in the grind stone-holding member via connecting areas and plural outer penetrating grooves intermittently formed in the grind stone-holding member via connecting areas, each of the inner connecting areas being arranged to face each of the outer penetrating grooves and each of the outer connecting areas being arranged to face each of the inner penetrating grooves. 
   
   
       3 . The grinding machine of  claim 1 , in which the circular air space area comprises plural inner penetrating holes intermittently formed in the grind stone-holding member via connecting areas and plural outer penetrating holes intermittently formed in the grind stone-holding member via connecting areas, each of the inner connecting areas being arranged to face each of the outer through holes and each of the outer connecting areas being arranged to face each of the inner through holes. 
   
   
       4 . The grinding machine of  claim 1 , in which the circular air space area comprises s circular upper unpenetrating groove which extends downwardly from an upper surface of the grind stone-holding member and a circular lower unpenetrating groove which extends upwardly from a lower surface of the grind stone-holding member, a total of a depth of the upper groove and a depth of the lower groove being larger than thickness of the grind stone-holding member. 
   
   
       5 . The grinding machine of  claim 1 , in which the circular air space area comprises circular porous material arranged in the grind stone-holding member on an inner side of the circular ultrasonic vibrator. 
   
   
       6 . The grinding machine of  claim 1 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises upper plural penetrating grooves intermittently formed via connecting areas formed in the cylinder member and lower plural penetrating grooves intermittently formed via connecting areas formed in the cylinder member, each of the upper connecting areas being arranged to face each of the lower penetrating grooves and each of the lower connecting areas being arranged to face each of the upper penetrating grooves. 
   
   
       7 . The grinding machine of  claim 1 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises circular outer unpenetrating grooves which extend inwardly from an outer surface of the cylinder member and circular inner unpenetrating grooves which extend outwardly from an inner surface of the cylinder member, a total of a depth of the outer groove and a depth of the inner groove being larger than thickness of the cylinder member. 
   
   
       8 . The grinding machine of  claim 1 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises circular porous material arranged in the cylinder member on an upper side of the circular ultrasonic vibrator. 
   
   
       9 . The grinding machine of  claim 1 , in which the support table rotates. 
   
   
       10 . A grinding tool comprising a grind stone-holding member on which a circular ultrasonic vibrator electrically connectable to an electric source is fixed, said grind stone-holing member having a center portion to be connected to a rotating shaft, and a circular grind stone attached to a lower end of a periphery of the grind stone-holding member, in which the grind stone-holding member of the grinding tool has a continuous or discontinuous circular air space area between a position of the circular ultrasonic vibrator and a position at which the grind stone-holding member is connected to the rotating shaft, the continuous or discontinuous circular air space area comprising multiple circular air space regions which comprise circularly formed or arranged continuous or discontinuous air spaces, whereby the circular air space area keeps an ultrasonic wave generated from the circular ultrasonic vibrator from linearly propagating to an area on an opposite side where the rotating shaft is connected. 
   
   
       11 . The grinding tool of  claim 10 , in which the circular air space area comprises plural inner penetrating grooves intermittently formed in the grind stone-holding member via connecting areas and plural outer penetrating grooves intermittently formed in the grind stone-holding member via connecting areas, each of the inner connecting areas being arranged to face each of the outer penetrating grooves and each of the outer connecting areas being arranged to face each of the inner penetrating grooves. 
   
   
       12 . The grinding tool of  claim 10 , in which the circular air space area comprises plural inner penetrating holes intermittently formed in the grind stone-holding member via connecting areas and plural outer penetrating holes intermittently formed in the grind stone-holding member via connecting areas, each of the inner connecting areas being arranged to face each of the outer through holes and each of the outer connecting areas being arranged to face each of the inner through holes. 
   
   
       13 . The grinding tool of  claim 10 , in which the circular air space area comprises circular upper unpenetrating grooves which extend downwardly from an upper surface of the grind stone-holding member and circular lower unpenetrating grooves which extend upwardly from a lower surface of the grind stone-holding member, a total of a depth of the upper groove and a depth of the lower groove being larger than thickness of the grind stone-holding member. 
   
   
       14 . The grinding tool of  claim 10 , in which the circular air space area comprises circular porous material arranged on an inner side of the circular ultrasonic vibrator. 
   
   
       15 . The grinding tool of  claim 10 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises upper plural penetrating grooves intermittently formed via connecting areas formed in the cylinder member and lower plural penetrating grooves intermittently formed via connecting areas formed in the cylinder member, each of the upper connecting areas being arranged to face each of the lower penetrating grooves and each of the lower connecting areas being arranged to face each of the upper penetrating grooves. 
   
   
       16 . The grinding tool of  claim 10 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises circular outer unpenetrating grooves which extend inwardly from an outer surface of the cylinder member and circular inner unpenetrating grooves which extend outwardly from an inner surface of the cylinder member, a total of a depth of the outer groove and a depth of the inner groove being larger than thickness of the cylinder member. 
   
   
       17 . The grinding tool of  claim 10 , in which the grind stone-holding member comprises a disc substrate and a cylinder member downwardly extended from a periphery of the disc substrate, and the circular air space area comprises circular porous material arranged in the cylinder member on an upper side of the circular ultrasonic vibrator.