Segmented film deposition

Abstract

A segmented film deposition wire grid polarizer with a separate coating on top of each rib.

1 . A segmented film deposition device, comprising:
 a) a substrate;   b) a generally parallel arrangement of thin, elongated elements disposed over the substrate, the elements having a surface opposite of the substrate and sides extending down to the substrate;   c) a coating on the surface of the elements and continuing partially down both sides of the elements without coating the substrate exposed between the elements.   
   
   
       2 . A device in accordance with  claim 1 , wherein the coating is segmented and the segments are aligned with the elements; and wherein the segments are wider than the element. 
   
   
       3 . A device in accordance with  claim 1 , wherein the coating forms an array of elongated beads aligned on top of the arrangement of elements. 
   
   
       4 . A device in accordance with  claim 3 , wherein the beads are wider than the elements. 
   
   
       5 . A device in accordance with  claim 3 , wherein the beads have a bulbous cross-sectional shape. 
   
   
       6 . A device in accordance with  claim 3 , wherein adjacent beads touch one another without attaching to one another to form a continuous layer, and defining a slip plane therebetween. 
   
   
       7 . A device in accordance with  claim 3 , wherein the beads have a rounded top surface. 
   
   
       8 . A device in accordance with  claim 1 , wherein the beads have a narrower lower end with respect to a higher portion. 
   
   
       9 . A device in accordance with  claim 1 , wherein the coating includes at least two layers. 
   
   
       10 . A device in accordance with  claim 1 , wherein the generally parallel arrangement of thin, elongated elements includes a conductive material forming wires spaced apart with a pitch less than a wavelength of incident light defining a wire-grid polarizer. 
   
   
       11 . A wire-grid polarizer device, comprising:
 a) a substrate;   b) a generally parallel arrangement of thin, elongated, conductive wires disposed over the substrate, the wires having a surface opposite of the substrate and sides extending down to the substrate;   c) a segmented coating on the surface of the wire with each segment continuing partially down both sides of a wire without coating the substrate exposed between the wires, and each segment being aligned over and wider than the wire.   
   
   
       12 . A device in accordance with  claim 11 , wherein adjacent segments touch one another without attaching to one another to form a continuous layer, and defining a slip plane therebetween. 
   
   
       13 . A device in accordance with  claim 11 , wherein the segments have a narrower lower end with respect to a higher portion. 
   
   
       14 . A method for fabricating a wire-grid polarizer, comprising;
 a) forming an array of parallel spaced-apart wires on a substrate; and   b) depositing a segmented film on the wires with the segments aligned with the wires and continuing partially down both sides of the wires without coating the substrate exposed between the wires.   
   
   
       15 . A method in accordance with  claim 14 , wherein depositing further includes sputtering the segmented film without coating the substrate between the wires. 
   
   
       16 . A method in accordance with  claim 14 , wherein depositing further includes depositing the segmented film so that the segments are wider than the wires. 
   
   
       17 . A method in accordance with  claim 14 , wherein depositing further includes depositing the segmented film so that the segments have a bulbous cross-sectional shape. 
   
   
       18 . A method in accordance with  claim 14 , wherein depositing further includes depositing the segmented film until the segments touch one another without attaching to one another to form a continuous layer, and defining a slip plane therebetween. 
   
   
       19 . A method in accordance with  claim 14 , wherein depositing includes depositing a segmented film so that the segments a rounded top surface. 
   
   
       20 . A method in accordance with  claim 14 , wherein depositing further includes depositing the segmented film so that the segments have a narrower lower end with respect to a higher portion. 
   
   
       21 . A method in accordance with  claim 14 , wherein depositing further includes depositing at least two layers.