Storage apparatus for storing semiconductor element or reticle

Abstract

The present invention provides a storage apparatus for storing a semiconductor element or a reticle. The storage apparatus comprises a first cover, a second cover and a flange. The first cover has a top and a plurality of laterals around the top. The second cover is for being assembled with the first cover to form an inner space for accommodating the reticle. As to the flange, it is provided on the first cover for being mechanically held and placed. The characteristic of the disclosed storage apparatus is that the flange and the first cover are integrally formed.

1 . A storage apparatus for storing a semiconductor element or a reticle, comprising:
 a first cover, having a top and a plurality of laterals around the top;   a second cover for being assembled with the first cover to form an inner space for accommodating the semiconductor element or the reticle;   at least one flange support, one end of each the flange support connected with the top of the first cover; and   at least one flange, the each flange individually connected with the other end of the each flange support for being held and placed by a machine;   wherein the flange and the first cover are integrally formed as a whole.   
   
   
       2 . The storage apparatus of  claim 1 , wherein the flange support is perpendicular to the top of the first cover. 
   
   
       3 . The storage apparatus of  claim 1 , wherein an included angle between the flange support and the top of the first cover is greater or less than 90 degrees. 
   
   
       4 . The storage apparatus of  claim 1 , wherein the flange support is perpendicular to the lateral of the first cover. 
   
   
       5 . The storage apparatus of  claim 1 , wherein an included angle between the flange support and the lateral of the first cover is greater or less than 90 degrees. 
   
   
       6 . The storage apparatus of  claim 1 , wherein a board is provided on the first cover. 
   
   
       7 . The storage apparatus of  claim 6 , wherein the board is integrally formed with the first cover. 
   
   
       8 . The storage apparatus of  claim 6 , wherein the board is for being tagged with a label. 
   
   
       9 . The storage apparatus of  claim 1 , further comprising an alarm. 
   
   
       10 . The storage apparatus of  claim 1 , further comprising a sensor. 
   
   
       11 . The storage apparatus of  claim 1 , further comprising an identifying device. 
   
   
       12 . The storage apparatus of  claim 11 , wherein the identifying device is a Radio Frequency Identification (RFID) device. 
   
   
       13 . A storage apparatus for storing a semiconductor element or a reticle, comprising:
 a first cover, having a top and a plurality of laterals around the top;   a second cover for being assembled with the first cover to form an inner space for accommodating the semiconductor element or the reticle;   at least one flange support, one end of each the flange support connected with the top of the first cover;   at least one flange, the each flange individually connected with the other end of the each flange support for being held and placed by a machine; and   a handle for being assembled with the first cover;   wherein the flange and the first cover are integrally formed as a whole.   
   
   
       14 . The storage apparatus of  claim 13 , wherein the flange support is perpendicular to the top of the first cover. 
   
   
       15 . The storage apparatus of  claim 13 , wherein an included angle between the flange support and the top of the first cover is greater or less than 90 degrees. 
   
   
       16 . The storage apparatus of  claim 13 , wherein the flange support is perpendicular to the lateral of the first cover. 
   
   
       17 . The storage apparatus of  claim 13 , wherein an included angle between the flange support and the lateral of the first cover is greater or less than 90 degrees. 
   
   
       18 . The storage apparatus of  claim 13 , wherein the handle is integrally formed with the first cover.