Method for manfacturing flat panel display and panel for flat panel display

Abstract

A method for forming a film includes a step of forming an insulator layer ( 17 ) on a substrate ( 111 ) on which electrodes (X and Y) are arranged, by a chemical vapor deposition process. Masks ( 71 and 72 ) having a shape covering terminal parts (Xt and Yt) of the electrodes (X and Y) are disposed proximately to the terminal parts (Xt and Yt) so as to be separated from the terminal parts (Xt, Yt) and to be opposed to the same. The insulator is deposited on the electrodes (X and Y) at a deposition rate of chemical vapor deposition that is lower at the terminal parts (Xt and Yt) than at parts of the electrodes (X and Y) that are not covered with the masks ( 71 and 72 ).

1 . A method for manufacturing a flat panel display in which an insulator layer is formed by a chemical vapor deposition process on a substrate on which electrodes are arranged, the method comprising the steps of:
 disposing a mask having a shape covering terminal parts of the electrodes so as to be close to, but be separated from and be opposed to the terminal parts; and   depositing an insulator on the electrodes at a deposition rate of chemical vapor deposition that is lower at the terminal parts than at parts of the electrodes that are not covered with the mask.   
   
   
       2 . The method for manufacturing a flat panel display according to  claim 1 ,
 wherein the deposition rate at the terminal parts is one tenth or lower of the deposition rate at the parts of the electrodes that are not covered with the mask.   
   
   
       3 . A panel used for manufacturing a flat panel display, comprising:
 a substrate having a larger area than a screen;   electrodes arranged on the substrate; and   a dielectric layer made of a single layer for covering the electrodes,   the electrodes extending from a display region corresponding to the screen on the substrate to a non-display region in a periphery of the display region, and including terminal parts located in the non-display region,   the dielectric layer covering parts of the electrodes located in the display region and the terminal parts, and   a thickness of a part of the dielectric layer covering the terminal parts of the electrodes being one tenth or smaller of a thickness of a part of the dielectric layer covering the parts of the electrodes located in the display region.   
   
   
       4 . The panel used for manufacturing a flat panel display according to  claim 3 ,
 wherein a protection film is formed on the dielectric layer.   
   
   
       5 . The panel used for manufacturing a flat panel display according to  claim 3 ,
 wherein the substrate is a mother substrate that is used for manufacturing a plurality of flat panel displays, each of the flat panel displays including a plurality of arranged electrodes corresponding to one flat panel display and a dielectric layer covering the plurality of arranged electrodes.   
   
   
       6 . The panel used for manufacturing a flat panel display according to  claim 4 ,
 wherein the substrate is a mother substrate that is used for manufacturing a plurality of flat panel displays, each of the flat panel displays including a plurality of arranged electrodes corresponding to one flat panel display and a dielectric layer covering the plurality of arranged electrodes.