Catalyst-aided chemical processing method and apparatus

Abstract

A catalyst-aided chemical processing method can process hard-to-process materials, especially SiC, GaN, etc. whose importance as electronic device materials is increasing these days, with high processing efficiency and high precision even for a space wavelength range of not less than several tens of μm. The catalyst-aided chemical processing method comprises: putting a workpiece in a processing liquid in which halogen-containing molecules are dissolved; and moving the workpiece and a catalyst composed of molybdenum or a molybdenum compound relative to each other while keeping the catalyst in contact with or close proximity to a surface to be processed of the workpiece, thereby processing the surface of the workpiece.

1 - 40 . (canceled) 
   
   
       41 . A catalyst-aided chemical processing apparatus comprising:
 a platen having a surface comprised of a solid catalyst composed of a transition metal, a ceramic solid catalyst, acidic or basic catalyst, a metal oxide ceramic, or a glass;   a holder for holding a workpiece and bringing a surface to be processed of the workpiece into contact with the platen;   a processing liquid supply section for supplying a processing liquid between the platen and the workpiece held by the holder and kept in contact with the platen;   a drive section for moving the platen and the workpiece, held by the holder and kept in contact with the platen, relative to each other; and   at least one of (a) a power source for applying a voltage between the surface to be processed of the workpiece and the catalyst, (b) a light source for irradiating the surface to be processed of the workpiece with light, (c) a workpiece temperature control mechanism for controlling the temperature of the workpiece during processing, (d) a processing liquid temperature control mechanism for controlling the temperature of the processing liquid, and (e) a catalyst temperature control mechanism for controlling the temperature of the catalyst.   
   
   
       42 . A catalyst-aided chemical processing apparatus according to  claim 41 , wherein said processing liquid can dissolve an oxide of the workpiece. 
   
   
       43 . A catalyst-aided chemical processing apparatus according to  claim 41 , wherein said processing liquid contains an oxidizing agent or a halogen. 
   
   
       44 . A catalyst-aided chemical processing apparatus according to  claim 41 , wherein said catalyst dissolves the surface to be processed of the workpiece. 
   
   
       45 . A catalyst-aided chemical processing apparatus according to  claim 41 , wherein said catalyst comprises platinum, gold, Fe, Ni, Co, Cu, Cr, or Ti.