Out-of-plane spring structures on a substrate

Abstract

A structure has at least one structure component formed of a first material residing on a substrate, such that the structure is out of a plane of the substrate. A first coating of a second material then coats the structure. A second coating of a non-oxidizing material coats the structure at a thickness less than a thickness of the second material.

1 . A structure, comprising:
 at least one structure component formed of a first material residing on a substrate, such that the structure is out of a plane of the substrate;   a first coating comprised of a second material coating the structure; and   a second coating comprised of a non-oxidizing material coating the structure at a thickness less than an electrical skin depth of the structure.   
   
   
       2 . The structure of  claim 1 , the structure component further comprising one selected from the group consisting of: a coil, a probe, a cantilever and a spring. 
   
   
       3 . The structure of  claim 1 , the structure further comprising a coil comprising two spring members, each having a free end, arranged such that the free ends latch to form the coil. 
   
   
       4 . The structure of  claim 1 , the first material further comprising one selected from the group consisting of: molybdenum chrome, nickel zirconium, nickel, copper, tungsten, gold and plastic. 
   
   
       5 . The structure of  claim 1 , the second material further comprising one selected from the group consisting of: copper, nickel and silver. 
   
   
       6 . The structure of  claim 1 , the non-oxidizing material further comprising gold. 
   
   
       7 . The structure of  claim 1 , the structure further comprising a diffusion barrier of a third material between the first and second coatings. 
   
   
       8 . The structure of  claim 7 , the third material further comprising nickel.