Polymer memory and method of its fabrication

Abstract

An embodiment mitigates one or more of the limiting factors of fabricating polymer ferroelectric memory devices. For example, an embodiment reduces the degradation of the ferroelectric polymer due to the polymer's reaction with, and migration or diffusion of, adjacent metal electrode material. Further, the ferroelectric polymer is exposed to fewer potentially high temperature or high energy processes that may damage the polymer. An embodiment further incorporates an immobilized catalyst to improve the adhesion between adjacent layers, and particularly between the electrolessly plated electrodes and the ferroelectric polymer.

1 . An apparatus comprising:
 a ferroelectric polymer;   an immobilized catalyst coupled to the ferroelectric polymer; and   a metal electrode coupled to the immobilized catalyst.   
     
     
         2 . The apparatus of  claim 1 , the ferroelectric polymer selected from the group consisting of polyvinylidene fluoride and a polyvinylidene fluoride trifluoroethylene copolymer. 
     
     
         3 . The apparatus of  claim 1 , the immobilized catalyst comprising palladium. 
     
     
         4 . The apparatus of  claim 1 , the metal electrode comprising a metal selected from the group consisting of Au, Ru, Rh, Pd, Pt, Ag, Co, Ni, Cu, Ir, and Os. 
     
     
         5 . The apparatus of  claim 4 , the metal further comprising an alloy material selected from the group consisting of W, Mo, Re, P, B, N, and a combination thereof. 
     
     
         6 . An apparatus comprising:
 a first immobilized palladium catalyst;   a first plated metal electrode coupled to the first immobilized palladium catalyst;   a first plated metal barrier coupled to the first plated metal electrode;   a ferroelectric polymer coupled to the first immobilized palladium catalyst;   a second immobilized palladium catalyst coupled to the ferroelectric polymer;   a second plated metal barrier coupled to the second immobilized palladium catalyst; and   a second plated metal electrode coupled to the second plated barrier.   
     
     
         7 . The apparatus of  claim 6 , the ferroelectric polymer selected from the group consisting of polyvinylidene fluoride and a polyvinylidene fluoride trifluoroethylene copolymer. 
     
     
         8 . The apparatus of  claim 6 , the first plated metal electrode and second plated metal electrode comprising a metal selected from the group consisting of Au, Ru, Rh, Pd, Pt, Ag, Co, Ni, Cu, Ir, and Os. 
     
     
         9 . The apparatus of  claim 8 , the metal further comprising an alloy material selected from the group consisting of W, Mo, Re, P, B, N, and a combination thereof. 
     
     
         10 . The apparatus of  claim 6 , the first plated metal barrier layer and the second plated metal barrier comprising a metal selected from the group consisting of CoWP, CoWPB, CoWB, CoWMoP, CoWMoPB, CoWMoB, CoWReP, CoWRePB, CoWReB, CoMoP, CoMoPB, CoMoB, CoReP, CoRePB, CoReB, CoMoReP, CoMoRePB, CoWMoReP, CoWMoReB, CoWMoReBP, CoMoReB, CoP, CoBP, and CoB. 
     
     
         11 . The apparatus of  claim 10 , the metal further comprising nitrogen. 
     
     
         12 . An apparatus comprising:
 a first immobilized catalyst;   a first plated metal electrode coupled to the first immobilized palladium catalyst;   a ferroelectric polymer coupled to the first plated metal electrode;   a second immobilized catalyst coupled to the ferroelectric polymer;   a second plated metal electrode coupled to the second immobilized catalyst.   
     
     
         13 . The apparatus of  claim 12 , the first immobilized catalyst and the second immobilized catalyst comprising palladium. 
     
     
         14 . The apparatus of  claim 12 , the ferroelectric polymer selected from the group consisting of polyvinylidene fluoride and a polyvinylidene fluoride trifluoroethylene copolymer. 
     
     
         15 . The apparatus of  claim 12 , the first plated metal electrode and second plated metal electrode comprising a metal selected from the group consisting of Au, Ru, Rh, Pd, Pt, Ag, Co, Ni, Cu, Ir, and Os. 
     
     
         16 . The apparatus of  claim 15 , the metal further comprising an alloy material selected from the group consisting of W, Mo, Re, P, B, N and a combination thereof. 
     
     
         17 . A method comprising:
 forming a first immobilized catalyst on a substrate;   forming a first seed metal on the immobilized catalyst;   plating a first metal electrode on the seed metal, wherein the plating is electroless; and   forming a ferroelectric polymer on the first metal electrode.   
     
     
         18 . The method of  claim 17  further comprising:
 forming a second immobilized catalyst on the ferroelectric polymer.   
     
     
         19 . The method of  claim 18  further comprising:
 forming a second seed metal on the second immobilized catalyst.   
     
     
         20 . The method of  claim 19  further comprising:
 plating a second metal electrode on the second seed metal, wherein the plating is electroless.