Process for preparing rotors or stators of a turbomolecular pump

Abstract

The invention relates to a process for preparing rotors or stators of a turbomolecular pump with rotor blades made of a specific aluminum alloy.

1 . A process for preparing rotors or stators of a turbomolecular pump with rotor blades made of an Al—Cu—Mg—Mn wrought alloy, characterized in that the rotor blades are produced by machining or a thermal ablation method from individual disks or solid bodies, followed by generating a desired angle of attack by reshaping. 
   
   
       2 . The process according to  claim 1 , characterized by employing a wrought alloy having the following composition:
 from 0.3 to 0.7% by weight of silicon (Si);   up to 0.15% by weight of iron (Fe);   from 3.5 to 4.5% by weight of copper (Cu);   from 0.1 to 0.5% by weight of manganese (Mn);   from 0.3 to 0.8% by weight of magnesium (Mg);   from 0.05 to 0.15% by weight of titanium (Ti);   from 0.1 to 0.25% by weight of zirconium (Zr);   from 0.3 to 0.7% by weight of silver (Ag);   up to 0.05% by weight of others individually;   up to 0.15% by weight of others in total; and   aluminum (Al) as the % by weight balance.   
   
   
       3 . The process according to  claim 1 , characterized in that said rotors or stators are prepared by embossing, coining or twisting.